XPS-DRVP1
iii
EDH0259En1010 – 08/10
Table of Contents
Warranty .......................................................................................................................................
ii
Definitions and Symbols ............................................................................................................
iv
Warning ........................................................................................................................................
v
Cautions ......................................................................................................................................
vii
1.0
Introduction.......................................................................................... 1
2.0
Overview of piezoelectric technology .................................................. 2
2.1
Actuator principle ..................................................................................................................2
2.2
Actuator travel range .............................................................................................................2
2.3
Stages principle .........................................................................
Erreur ! Signet non défini.
2.4
Position sensors......................................................................................................................3
2.5
Piezoelectric technology pros and cons ................................................................................4
3.0
Newport solution advantages............................................................... 4
3.1
Control loops ..........................................................................................................................4
3.1.1
Open loop..............................................................................................................5
3.1.2
Close loop control ................................................................................................6
4.0
Specifications........................................................................................ 8
4.1
XPS-DRVP1 Functional description ....................................................................................8
4.2
XPS-DRVP1 Specifications ..................................................................................................8
5.0
Starting up............................................................................................ 9
5.1
Installing the XPS-DRVP1 in the XPS controller ...............................................................9
5.2
Stage connection ....................................................................................................................9
5.3
Powering up..........................................................................................................................10
5.3.1
XPS Controller ...................................................................................................10
5.3.2
Axis initialization ...............................................................................................10
5.3.3
Axial Load verification ......................................................................................11
6.0
Offset adjustment procedure ............................................................. 13
7.0
Accuracy linear correction procedure............................................... 15
8.0
Description/Use of « BNC » output.................................................... 17