XPS-DRVP1
15
EDH0259En1010 – 08/10
7.0
Accuracy linear correction procedure
Absolute accuracy of piezoelectric stages equipped with a position sensor and controlled
in close loop is directly related to its sensor quality.
As described in the
Position sensors
chapter, strain gage type position sensors have a
typical accuracy linearity of 0.1%.
The XPS controller and the XPS-DRVP1 driver board allow compensation for this linear
error by modifying the “DriverTravelCorrection” parameter of the “Stages.ini” file.
To modify this parameter, proceed as follows:
o
Install an external position measuring device (I.E. interferometer) on the moving
part of the piezoelectric stage to acquire the actual stage position variation.
o
In the list proposed by the « STAGE/Modify » menu, select the corresponding
stage, and then click on « Modify » button.
o
Then, in the parameters list, find the line starting with:
« DriverStagePositionOffset »
