1
EDH0199En2041 — 12/18
MFA Series Miniature Linear Stages
Miniature Linear Stages
MFA Series
1.0 —
Introduction
This manual provides operating instructions for the stage that you have
purchased in the MFA Series:
1)
REMARK
Vacuum compatible stage to 10
-6
hPa. In this case, the max. speed and
load capacity have to be divided by two.
MFA-CC miniature linear stage.
RECOMMENDATION
We recommend you read carefully the chapter “Connection to
electronics” before using the MFA stage.
MFA stages in an XYZ configuration.
• MFA-CC
• MFA-CCV6
(1)
• MFA-PP
• MFA-PPD
