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EDH0199En2041 — 12/18

iv

MFA Series Miniature Linear Stages

9.0 — Maintenance

..............................................................................15

9.1

Maintenance ............................................................................................15

9.2

Repair .......................................................................................................15

9.3

Calibration ...............................................................................................15

Service Form .........................................................................................................17

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Summary of Contents for MFA Series

Page 1: ...Miniature Linear Stages MFA Series USER S MANUAL G U ARANTE E D S P E CIFICATIO N S...

Page 2: ...arranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damag...

Page 3: ...nitions 4 3 4 Load Characteristics and Stiffness 5 3 5 Stage Weights 5 4 0 Drives and Motors 6 4 1 Stepper Drive Version 6 4 2 DC Motor Drive Version 6 4 3 Sensor Position 7 4 4 Feedback Signal Positi...

Page 4: ...EDH0199En2041 12 18 iv MFA Series Miniature Linear Stages 9 0 Maintenance 15 9 1 Maintenance 15 9 2 Repair 15 9 3 Calibration 15 Service Form 17...

Page 5: ...he Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility complies with all the relevant provisions of the D...

Page 6: ...ety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially haz...

Page 7: ...y liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop...

Page 8: ...g temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected be...

Page 9: ...that you have purchased in the MFA Series 1 REMARK Vacuum compatible stage to 10 6 hPa In this case the max speed and load capacity have to be divided by two MFA CC miniature linear stage RECOMMENDATI...

Page 10: ...bearing damage from accidental over travel MFA stages feature an all steel construction that provides a higher stiffness to weight ratio and lower thermal expansion compared to aluminum designs The re...

Page 11: ...ility Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached fr...

Page 12: ...Off Centered Load Q Maximum cantilever load a stage can move Q Cz 1 D a D Cantilever distance a Construction parameter MFA PP and MFA PPD MFA CC Travel Range in mm 1 25 Minimum Incremental Motion m 0...

Page 13: ...ights The weight indicated is the average value for stages with their cable installed The weight variation between drive units is not very significant MFA CCV6 stage Weight lb kg MFA 1 3 0 6 Cz Normal...

Page 14: ...for the Stepper Motor 4 2 DC Motor Drive Version One DC motor driven configuration is available MFA CC DC Motor Performance Specifications and Characteristics NOTE For the MFA CCV6 vacuum compatible s...

Page 15: ...voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 4 3 Sensor Position End of Run are 5 V open collector type CAUTION End of Run are...

Page 16: ...n circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 4 5 Pinouts The pinout diagram for the MFA PP stages mini DIN9 connector is shown below Pin 21...

Page 17: ...5 Motor 6 Motor 7 Motor 8 Motor 9 N C 10 N C 11 N C 12 N C 13 Reserved 1 14 Ground 15 N C 16 0 V 17 End of Run 18 End of Run 19 Encoder Phase A 20 Encoder Phase B 21 5 V 22 0 V 23 Encoder Phase A 24...

Page 18: ...he electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humi...

Page 19: ...stem quickly and safely 5 3 Cables MFA PP MFA PPD and MFA CC are delivered equipped with a 3 meter cable the MFA CCV6 stage is delivered with a 1 5 meter cable These cables are equipped with a SUB D25...

Page 20: ...ntrollers End of Runs and Mechanical Zero are open collector type with a 5 6 V protective Zener diode Reserved EEPROM Enable Iin max 10 mA V max 30 V NEWPORT STAGE SUB D25M CONNECTOR 5 V R Pull Up Res...

Page 21: ...NSC200 Single Axis Low Power Motion Controller Driver 7 0 Dimensions 1 89 48 87 49 22 12 5 1 42 36 79 20 5 26 133 5 79 20 1 42 36 79 20 39 10 98 25 1 42 36 1 77 45 CABLE LENGTH 9 8 FT 3 M 4 HOLES C B...

Page 22: ...M MFA TP Top Plates 8 3 MFA BP Base Plate 6 HOLES 24 6 1 77 45 1 21 30 65 38 9 65 31 8 2 17 55 79 20 79 20 1 42 36 2 HOLES C BORED FOR 4 40 M3 SCREW 4 HOLES C BORED FOR M2 SCREW 24 6 4 HOLES C BORED F...

Page 23: ...Newport for re lubrication after 2000 hours of use If the MFA stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions 9 2...

Page 24: ...EDH0199En2041 12 18 16 MFA Series Miniature Linear Stages...

Page 25: ...Fax Name Company Address Country P O Number Item s Being Returned Model Description Reasons of return of goods please list any specific problems Return authorization Please obtain prior to return of i...

Page 26: ...sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois...

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