1
1 Introduction
Thank you for purchasing the New Cosmos XPS-7II extractive-type portable
semiconductor gas detector. To ensure safe and reliable operation, please
read this instruction manual prior to use.
This product is intended for use in a semiconductor-manufacturing plant
for the
early detection of a gas leak. It can detect various semiconductor
manufacturing gases just by switching the sensor unit.
This unit measures the gas concentration and simultaneously displays the
measurement on its display. If the gas concentration level reaches a preset
level, the unit will produce audio-visual alarms.
Carefully read this manual regardless of your experience with gas detectors.
Do not use the product for other than the intended purpose or in a manner not
described in this manual.
Symbols Used in this Manual
This manual uses Danger, Warning, Caution and Note symbols to draw
attention to procedures, materials, methods, and processes, which require
particular attention.
Indicates an imminently hazardous situation that can
result in death or serious injury.
Indicates a potentially hazardous situation that may
result in death or serious injury.
Indicates a hazardous situation that may result in
minor injury or property damage.
Provides advice/information on product handling.
NOTE
DANGER
WARNING
CAUTION
Table of Contents
1 Introduction
1
Safety Precautions
2
2 Package Contents
3
3 Sensor Unit Variations
3
4 Unit Components
4
5 Operation
7
5-1 Battey Installation
7
5-2 Sensor Unit Installation
7
5-3 Power on
9
5-4 Detection
9
5-5 Power off
9
6 Data Logging
10
7 Filter Element Replacement
11
8 Maintenance
12
9 Troubleshooting
13
10 Consumable and Optional parts
13
11 Warranty
14
12 Specifications
15
1
1 Introduction
Thank you for purchasing the New Cosmos XPS-7II extractive-type portable
semiconductor gas detector. To ensure safe and reliable operation, please
read this instruction manual prior to use.
This product is intended for use in a semiconductor-manufacturing plant
for the
early detection of a gas leak. It can detect various semiconductor
manufacturing gases just by switching the sensor unit.
This unit measures the gas concentration and simultaneously displays the
measurement on its display. If the gas concentration level reaches a preset
level, the unit will produce audio-visual alarms.
Carefully read this manual regardless of your experience with gas detectors.
Do not use the product for other than the intended purpose or in a manner not
described in this manual.
Symbols Used in this Manual
This manual uses Danger, Warning, Caution and Note symbols to draw
attention to procedures, materials, methods, and processes, which require
particular attention.
Indicates an imminently hazardous situation that can
result in death or serious injury.
Indicates a potentially hazardous situation that may
result in death or serious injury.
Indicates a hazardous situation that may result in
minor injury or property damage.
Provides advice/information on product handling.
NOTE
DANGER
WARNING
CAUTION
Table of Contents
1 Introduction
1
Safety Precautions
2
2 Package Contents
3
3 Sensor Unit Variations
3
4 Unit Components
4
5 Operation
7
5-1 Battey Installation
7
5-2 Sensor Unit Installation
7
5-3 Power on
9
5-4 Detection
9
5-5 Power off
9
6 Data Logging
10
7 Filter Element Replacement
11
8 Maintenance
12
9 Troubleshooting
13
10 Consumable and Optional parts
13
11 Warranty
14
12 Specifications
15
