background image

 

 

2  Package Contents 

 

A standard package consists of following items. If any items are missing or 

damaged, please contact New Cosmos or its authorized representative for 

replacement. 

 

 

 

 

 

 

 

 

 

 

 

3  Sensor Unit Variations 

 

Model 

Target gas 

F.S. 

Alarm set value 

1

st

 stage 

2

nd

 stage 

XDS-7NH NH

3

 Ammonia 

100ppm  

12ppm  

25ppm 

XDS-7SH SiH

4

 Silane 

25ppm  

2.5ppm  

5ppm 

XDS-7DC SiH

2

Cl

2

 Dichlorosilane 

25ppm  

2.5ppm 

5ppm 

XDS-7AH AsH

3

 Arsine 

250ppb  

25ppb 

50ppb 

XDS-7PH PH

3

 Phosphine 

1ppm  

0.15ppm 

0.3ppm 

XDS-7BH B

2

H

6

  Diborane 

500ppb  50ppb 100ppb 

XDS-7SE H

2

Se 

Hydrogen selenide 

250ppb   

25ppb 

50ppb 

XDS7GH GeH

4

 Germane 

1ppm  

0.1ppm 

0.2ppm 

XDS-7CL Cl

2

 Chlorine 

5ppm  

0.25ppm 

0.5ppm 

XDS-7CF ClF

3

 

Chlorine trifluoride 

1ppm   

0.05ppm 

0.1ppm 

XDS-7HC 

HCl 

Hydrogen chloride 

25ppm   

2.5ppm 

5ppm 

XDS-7HF 

HF 

Hydrogen fluoride 

10ppm   

1.5ppm 

3ppm 

XDS-7HB 

HBr 

Hydrogen bromide 

10ppm   

1.5ppm 

3ppm 

XDS-7NO 

NO 

Nitrogen monoxide 

100ppm  

12ppm  

25ppm 

XDS-7HS H

2

Hydrogen sulfide 

50ppm  

5ppm  

10ppm 

XDS-7CO 

CO 

Carbon monoxide 

250ppm  

12.5ppm  

25ppm 

XDS-7DS Si

2

H

6

 Disilane 

25ppm  

2.5ppm  

5ppm 

XDS-7F2 F

2

 

Fluorine 

5ppm  

0.5ppm  

1ppm 

XDS-7OZ O

3

 Ozone 

1ppm  

0.05ppm 

0.1ppm 

XDS-7NF NF

3

 

Nitrogen trifloride 

100ppm 

5ppm 

10ppm 

Item Qty. 

Gas detector 

Shoulder strap 

Gas sampling tube 

Replacement filter element 

Alkaline AA battery 

Instruction manual (this document) 

Inspection certificate 

 

 

Safety Precautions 

 

Follow the precautions below to ensure safe operation: 

  

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Follow the precautions below for storage of the product: 

  

 

 

 

 

 

 

 

 

 

 

 Do not leave the product in high temperature and 

humidity conditions for a long period of time. Doing so 

may compromise its performance.

 

WARNING 

 This product is not drip-proof and should be kept away 

from water. 

 Avoid strong mechanical shock, impact or vibration to 

the product, e.g., dropping or bumping. Failure to do 

so may impair its performance. 

 Turn on the detector in clean air. Normal gas detection 

is not possible, and product’s performance may be 

compromised if turned on in an atmosphere that may 

contain target or interfering gases. 

 The service life of the sensor unit is six months. 

Before use, check that the sensor unit expiration date 

has not been reached. Use of expired sensor may 

cause inaccurate detection. 

 Carry and use the detector with its face (LCD) facing 

upward to keep the sensor vertical. 

CAUTION 

 Avoid rapid change in temperature/humidity. Failure to 

do so may compromise the product’s performance. 

 If this product is to be unused or stored for an extended 

period of time, the batteries should be removed. 

CAUTION 

 This product is not explosion-proof and should not be 

installed in a hazardous area. 

 

WARNING 

 

 

2  Package Contents 

 

A standard package consists of following items. If any items are missing or 

damaged, please contact New Cosmos or its authorized representative for 

replacement. 

 

 

 

 

 

 

 

 

 

 

 

3  Sensor Unit Variations 

 

Model 

Target gas 

F.S. 

Alarm set value 

1

st

 stage 

2

nd

 stage 

XDS-7NH NH

3

 Ammonia 

100ppm  

12ppm  

25ppm 

XDS-7SH SiH

4

 Silane 

25ppm  

2.5ppm  

5ppm 

XDS-7DC SiH

2

Cl

2

 Dichlorosilane 

25ppm  

2.5ppm 

5ppm 

XDS-7AH AsH

3

 Arsine 

250ppb  

25ppb 

50ppb 

XDS-7PH PH

3

 Phosphine 

1ppm  

0.15ppm 

0.3ppm 

XDS-7BH B

2

H

6

  Diborane 

500ppb  50ppb 100ppb 

XDS-7SE H

2

Se 

Hydrogen selenide 

250ppb   

25ppb 

50ppb 

XDS7GH GeH

4

 Germane 

1ppm  

0.1ppm 

0.2ppm 

XDS-7CL Cl

2

 Chlorine 

5ppm  

0.25ppm 

0.5ppm 

XDS-7CF ClF

3

 

Chlorine trifluoride 

1ppm   

0.05ppm 

0.1ppm 

XDS-7HC 

HCl 

Hydrogen chloride 

25ppm   

2.5ppm 

5ppm 

XDS-7HF 

HF 

Hydrogen fluoride 

10ppm   

1.5ppm 

3ppm 

XDS-7HB 

HBr 

Hydrogen bromide 

10ppm   

1.5ppm 

3ppm 

XDS-7NO 

NO 

Nitrogen monoxide 

100ppm  

12ppm  

25ppm 

XDS-7HS H

2

Hydrogen sulfide 

50ppm  

5ppm  

10ppm 

XDS-7CO 

CO 

Carbon monoxide 

250ppm  

12.5ppm  

25ppm 

XDS-7DS Si

2

H

6

 Disilane 

25ppm  

2.5ppm  

5ppm 

XDS-7F2 F

2

 

Fluorine 

5ppm  

0.5ppm  

1ppm 

XDS-7OZ O

3

 Ozone 

1ppm  

0.05ppm 

0.1ppm 

XDS-7NF NF

3

 

Nitrogen trifloride 

100ppm 

5ppm 

10ppm 

Item Qty. 

Gas detector 

Shoulder strap 

Gas sampling tube 

Replacement filter element 

Alkaline AA battery 

Instruction manual (this document) 

Inspection certificate 

 

 

Safety Precautions 

 

Follow the precautions below to ensure safe operation: 

  

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Follow the precautions below for storage of the product: 

  

 

 

 

 

 

 

 

 

 

 

 Do not leave the product in high temperature and 

humidity conditions for a long period of time. Doing so 

may compromise its performance.

 

WARNING 

 This product is not drip-proof and should be kept away 

from water. 

 Avoid strong mechanical shock, impact or vibration to 

the product, e.g., dropping or bumping. Failure to do 

so may impair its performance. 

 Turn on the detector in clean air. Normal gas detection 

is not possible, and product’s performance may be 

compromised if turned on in an atmosphere that may 

contain target or interfering gases. 

 The service life of the sensor unit is six months. 

Before use, check that the sensor unit expiration date 

has not been reached. Use of expired sensor may 

cause inaccurate detection. 

 Carry and use the detector with its face (LCD) facing 

upward to keep the sensor vertical. 

CAUTION 

 Avoid rapid change in temperature/humidity. Failure to 

do so may compromise the product’s performance. 

 If this product is to be unused or stored for an extended 

period of time, the batteries should be removed. 

CAUTION 

 This product is not explosion-proof and should not be 

installed in a hazardous area. 

 

WARNING 

Summary of Contents for XPS-7II

Page 1: ...Semiconductor Gas Detector XPS 7II Instruction Manual Keep this manual for easy reference Carefully read this manual prior to use Instruction Manual No XPS 7IIET 01 ...

Page 2: ...ance 12 9 Troubleshooting 13 10 Consumable and Optional parts 13 11 Warranty 14 12 Specifications 15 Table of Contents 1 Introduction 1 Safety Precautions 2 2 Package Contents 3 3 Sensor Unit Variations 3 4 Unit Components 4 5 Operation 7 5 1 Battey Installation 7 5 2 Sensor Unit Installation 7 5 3 Power on 9 5 4 Detection 9 5 5 Power off 9 6 Data Logging 10 7 Filter Element Replacement 11 8 Maint...

Page 3: ...njury or property damage Provides advice information on product handling NOTE DANGER WARNING CAUTION 1 1 Introduction Thank you for purchasing the New Cosmos XPS 7II extractive type portable semiconductor gas detector To ensure safe and reliable operation please read this instruction manual prior to use This product is intended for use in a semiconductor manufacturing plant for the early detection...

Page 4: ... CAUTION This product is not explosion proof and should not be installed in a hazardous area WARNING 2 Safety Precautions Follow the precautions below to ensure safe operation Follow the precautions below for storage of the product Do not leave the product in high temperature and humidity conditions for a long period of time Doing so may compromise its performance WARNING This product is not drip ...

Page 5: ...t filter element 2 Alkaline AA battery 4 Instruction manual this document 1 Inspection certificate 1 3 2 Package Contents A standard package consists of following items If any items are missing or damaged please contact New Cosmos or its authorized representative for replacement 3 Sensor Unit Variations Model Target gas F S Alarm set value 1st stage 2nd stage XDS 7NH NH3 Ammonia 100ppm 12ppm 25ppm...

Page 6: ...n the battery is close to empty Lights up when the cover is open while the detector is off Main unit 4 4 Unit Components Item Component name Description Function 1 Green POWER LED Lit while in normal operation mode gas monitoring mode and flashes while in warm up cycle 2 Amber TROUBLE LED Flashing indicates an internal failure is present 3 Red ALARM LED When the gas concentration level exceeds the...

Page 7: ... flashing Logging icon Lit when data logging is in progress Operation buttons behind the front cover 5 Item Component name Description Function 1 POWER button Press and hold to turn on off the detector 2 AL button to check the alarm set values Each press cycles through 1st stage alarm set value 2nd stage alarm set value and current gas concentration value on the LCD 3 BZ STOP button Press to mute ...

Page 8: ...ube adapter connects to the gas inlet port of the detector Pull the tube adaptor Insert Tube adaptor 6 Gas sampling tube Installation Push and insert the tube adapter of the gas sampling tube into the detector s gas inlet port The tube adapter is automatically locked and sealed to the port when inserted Ensure that it is securely connected by pulling it slightly Removal Press and hold the release ...

Page 9: ...mpty battery like a above while the unit is off CAUTION Battery compartment Battery cover Snap latch 7 5 Operation Perform a routine check page 12 before use Normal gas detection may not be possible without check which will then fail gas leak detection 5 1 Battery Installation 1 Lift and unlock the snap latch on the battery cover Pull the cover forward The cover is now removable 2 Install the four...

Page 10: ...g CDS 7 COS 7 CHS 7 cannot be used CAUTION Sensor unit Sensor port Sensor cover Connector Snap latch 8 5 2 Sensor Unit Installation 1 Lift and unlock the snap latch on the sensor cover Pull the cover forward The cover is now open this cover cannot be detached from the unit 2 Install a sensor unit in the detector by engaging with the connector and sensor port on the detector 3 Reinstall the sensor ...

Page 11: ...ERO button to perform a zero adjustment Ensure that the zero adjustment is done in clean air CAUTION 9 5 3 Power on 1 Press and hold the POWER button The unit gives off a long beep Then the green POWER LED starts flashing The warm up cycle 30 second self test followed by automatic zero adjustment starts 2 When the warm up cycle is completed the flashing POWER LED becomes steady indicating that the...

Page 12: ... software s instruction manual separate document for the procedure to transfer log data to a pc NOTE 10 6 Data Logging The detector can log up to 22 hours of the measurement data The log data can also be transferred to a pc by using data logger kit sold separately see 10 Consumable and Optional Parts on page 13 1 During normal operation press the button LoG appears on the LCD The log starting time...

Page 13: ...right bottom corner of the LCD They are just the ex factory parameters and not for customer use NOTE 11 7 Filter Element Replacement Replace the filter element with a new one if it is dirty or wet 1 Turn the retainer and short probe as a whole counterclockwise to remove them from the filter case 2 Remove the O ring from the filter case 3 Replace the filter element with a new one 4 Reinstall the O ...

Page 14: ...scheduled annual inspections once a year at least Cleaning Clean the exterior with a soft damp cloth 12 8 Maintenance Routine Check pre use check Perform a routine check before each use Check the tube of the gas sampling tube for damage or wear If any replace with a new one Check the filter element in the filter case Replace it with a new one if dirty or discolored Annual Inspection Contact New Co...

Page 15: ...ata to a pc Communication adapter CA 7 Serial cross cable KRS L09 2K Does not comply with CE marking 13 9 Troubleshooting Before contacting us for service repair perform basic troubleshooting using the table below If the detector locks up cannot be turned off remove all batteries After a few minutes put the batteries back in and turn on the detector Symptom Cause Action Reference Pressing POWER bu...

Page 16: ...om improper consumable replacement 5 Other failures and damages not attributable to the manufacturer 14 11 Warranty The warranty period is one 1 year from the date of purchase You are entitled to the limited warranty if the product malfunctions due to a manufacturing defect during normal use in accordance with the instruction manual specifications and labels Warranty Scope If the product fails or ...

Page 17: ...e are two types of EC 7 sensor stocker global and domestic for use in Japan Global type is CE marked 15 12 Specifications Target gas Semiconductor manufacturing gases Detection principle Electrochemical sensor Electrochemical pyrolyzer sensor Gas sampling method Extractive type pump Detection range As per delivery specifications Gas concentration display Four digit on LCD Indication accuracy 1 10 ...

Page 18: ...r its authorized representative for ordering The contents of this manual are subject to change without notice Authorized representative Manufacturer NEW COSMOS ELECTRIC CO LTD 2 5 4 Mitsuya naka Yodogawa ku Osaka 532 0036 Japan URL https www newcosmos global com XPS 7ⅡET 01 2008 050 ...

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