background image

 

 

5-3. Power on 

(1)  Press and hold the POWER button. The unit gives off a long beep. Then 

the green POWER LED starts flashing. The warm-up cycle (30-second 

self-test followed by automatic zero adjustment) starts. 

(2) When the warm-up cycle is completed, the flashing POWER LED 

becomes steady, indicating that the unit is ready for detection. 

 

 

 

 

 

 

 

 

5-4. Detection 

Put the short probe to the suspected leak point. When a gas leak is detected, 

the gas concentration value will be displayed on the LCD. If the gas 

concentration level exceeds the preset level, the red ALARM LED starts 

flashing and the detector starts beeping as shown in the table below. 

 

Gas concentration exceeds 

Red ALARM LED 

Audio alarm 

1

st

 stage alarm set value 

Flashes 

Beeps 

2

nd

 stage alarm set value 

Flashes fast 

Beeps fast 

F.S. value 

Flashes faster 

Steady tone 

 
 
 
 
 
 
 
 

5-5. Power off 

Before turning off the detector, ensure that the reading shows zero in clean air 

by running the detector in clean air. Press and hold the POWER button to turn 

off the detector. 

 

 

 

 

 

 Zero adjustment (zeroing) is performed automatically 

when the detector is turned on. Turn on the detector in 

clean air to prevent incorrect zero adjustment. Incorrect 

zero adjustment will cause inaccurate detection. 

 After turning off the detector, leave it for more than one 

second before turning it on again. 

CAUTION 

 After detection of adsorptive gas (e.g., HF and F

2

), 

replace the filter element (FE-112) with a new one

Correct detection is not possible if the filter element is 

dirty. 

CAUTION 

 Avoid liquid seepage (e.g., water). Liquid entering the 

gas sampling tube or gas detector will impair proper gas 

detection, leading to a product failure. 

 If the zero point drifts due to exposure to high 

concentration gas, etc., power cycle the detector or 

press and hold the ZERO button to perform a zero 

adjustment. Ensure that the zero adjustment is done in 

clean air. 

CAUTION 

 

 

5-2. Sensor Unit Installation 

(1) Lift and unlock the snap latch on the sensor cover. Pull the cover 

forward. The cover is now open (this cover cannot be detached from 

the unit). 

(2)  Install a sensor unit in the detector by engaging with the connector and 

sensor port on the detector. 

(3)  Reinstall the sensor cover and lock the snap latch. 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 Normal gas detection is not possible, if the sensor 

unit is not securely connected to the detector, causing 

poor airtightness. 

 Energize sensor units with an EC-7 sensor stocker 

(sold separately) before use. Normal gas detection is 

not possible if the sensor units are not sufficiently 

energized. Insufficient energization may cause a 

sensor fault alarm. Also, a sensor unit is being 

energized while installed in the detector even though 

the detector is off, as long as the battery remains or 

power is supplied. 

 Before regular sensor unit replacement, fully energize 

a new sensor unit (e.g., ex-factory unit) by installing it 

in an EC-7 sensor stocker (sold separately) or this 

detector. 

 Only use XDS-7 series sensor unit for this detector. 

Others (e.g., CDS-7, COS-7, CHS-7) cannot be used. 

CAUTION 

Sensor unit 

Sensor port 

Sensor cover 

Connector 

Snap latch 

 

 

5-3. Power on 

(1)  Press and hold the POWER button. The unit gives off a long beep. Then 

the green POWER LED starts flashing. The warm-up cycle (30-second 

self-test followed by automatic zero adjustment) starts. 

(2) When the warm-up cycle is completed, the flashing POWER LED 

becomes steady, indicating that the unit is ready for detection. 

 

 

 

 

 

 

 

 

5-4. Detection 

Put the short probe to the suspected leak point. When a gas leak is detected, 

the gas concentration value will be displayed on the LCD. If the gas 

concentration level exceeds the preset level, the red ALARM LED starts 

flashing and the detector starts beeping as shown in the table below. 

 

Gas concentration exceeds 

Red ALARM LED 

Audio alarm 

1

st

 stage alarm set value 

Flashes 

Beeps 

2

nd

 stage alarm set value 

Flashes fast 

Beeps fast 

F.S. value 

Flashes faster 

Steady tone 

 
 
 
 
 
 
 
 

5-5. Power off 

Before turning off the detector, ensure that the reading shows zero in clean air 

by running the detector in clean air. Press and hold the POWER button to turn 

off the detector. 

 

 

 

 

 

 Zero adjustment (zeroing) is performed automatically 

when the detector is turned on. Turn on the detector in 

clean air to prevent incorrect zero adjustment. Incorrect 

zero adjustment will cause inaccurate detection. 

 After turning off the detector, leave it for more than one 

second before turning it on again. 

CAUTION 

 After detection of adsorptive gas (e.g., HF and F

2

), 

replace the filter element (FE-112) with a new one

Correct detection is not possible if the filter element is 

dirty. 

CAUTION 

 Avoid liquid seepage (e.g., water). Liquid entering the 

gas sampling tube or gas detector will impair proper gas 

detection, leading to a product failure. 

 If the zero point drifts due to exposure to high 

concentration gas, etc., power cycle the detector or 

press and hold the ZERO button to perform a zero 

adjustment. Ensure that the zero adjustment is done in 

clean air. 

CAUTION 

 

 

5-2. Sensor Unit Installation 

(1) Lift and unlock the snap latch on the sensor cover. Pull the cover 

forward. The cover is now open (this cover cannot be detached from 

the unit). 

(2)  Install a sensor unit in the detector by engaging with the connector and 

sensor port on the detector. 

(3)  Reinstall the sensor cover and lock the snap latch. 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 Normal gas detection is not possible, if the sensor 

unit is not securely connected to the detector, causing 

poor airtightness. 

 Energize sensor units with an EC-7 sensor stocker 

(sold separately) before use. Normal gas detection is 

not possible if the sensor units are not sufficiently 

energized. Insufficient energization may cause a 

sensor fault alarm. Also, a sensor unit is being 

energized while installed in the detector even though 

the detector is off, as long as the battery remains or 

power is supplied. 

 Before regular sensor unit replacement, fully energize 

a new sensor unit (e.g., ex-factory unit) by installing it 

in an EC-7 sensor stocker (sold separately) or this 

detector. 

 Only use XDS-7 series sensor unit for this detector. 

Others (e.g., CDS-7, COS-7, CHS-7) cannot be used. 

CAUTION 

Sensor unit 

Sensor port 

Sensor cover 

Connector 

Snap latch 

Summary of Contents for XPS-7II

Page 1: ...Semiconductor Gas Detector XPS 7II Instruction Manual Keep this manual for easy reference Carefully read this manual prior to use Instruction Manual No XPS 7IIET 01 ...

Page 2: ...ance 12 9 Troubleshooting 13 10 Consumable and Optional parts 13 11 Warranty 14 12 Specifications 15 Table of Contents 1 Introduction 1 Safety Precautions 2 2 Package Contents 3 3 Sensor Unit Variations 3 4 Unit Components 4 5 Operation 7 5 1 Battey Installation 7 5 2 Sensor Unit Installation 7 5 3 Power on 9 5 4 Detection 9 5 5 Power off 9 6 Data Logging 10 7 Filter Element Replacement 11 8 Maint...

Page 3: ...njury or property damage Provides advice information on product handling NOTE DANGER WARNING CAUTION 1 1 Introduction Thank you for purchasing the New Cosmos XPS 7II extractive type portable semiconductor gas detector To ensure safe and reliable operation please read this instruction manual prior to use This product is intended for use in a semiconductor manufacturing plant for the early detection...

Page 4: ... CAUTION This product is not explosion proof and should not be installed in a hazardous area WARNING 2 Safety Precautions Follow the precautions below to ensure safe operation Follow the precautions below for storage of the product Do not leave the product in high temperature and humidity conditions for a long period of time Doing so may compromise its performance WARNING This product is not drip ...

Page 5: ...t filter element 2 Alkaline AA battery 4 Instruction manual this document 1 Inspection certificate 1 3 2 Package Contents A standard package consists of following items If any items are missing or damaged please contact New Cosmos or its authorized representative for replacement 3 Sensor Unit Variations Model Target gas F S Alarm set value 1st stage 2nd stage XDS 7NH NH3 Ammonia 100ppm 12ppm 25ppm...

Page 6: ...n the battery is close to empty Lights up when the cover is open while the detector is off Main unit 4 4 Unit Components Item Component name Description Function 1 Green POWER LED Lit while in normal operation mode gas monitoring mode and flashes while in warm up cycle 2 Amber TROUBLE LED Flashing indicates an internal failure is present 3 Red ALARM LED When the gas concentration level exceeds the...

Page 7: ... flashing Logging icon Lit when data logging is in progress Operation buttons behind the front cover 5 Item Component name Description Function 1 POWER button Press and hold to turn on off the detector 2 AL button to check the alarm set values Each press cycles through 1st stage alarm set value 2nd stage alarm set value and current gas concentration value on the LCD 3 BZ STOP button Press to mute ...

Page 8: ...ube adapter connects to the gas inlet port of the detector Pull the tube adaptor Insert Tube adaptor 6 Gas sampling tube Installation Push and insert the tube adapter of the gas sampling tube into the detector s gas inlet port The tube adapter is automatically locked and sealed to the port when inserted Ensure that it is securely connected by pulling it slightly Removal Press and hold the release ...

Page 9: ...mpty battery like a above while the unit is off CAUTION Battery compartment Battery cover Snap latch 7 5 Operation Perform a routine check page 12 before use Normal gas detection may not be possible without check which will then fail gas leak detection 5 1 Battery Installation 1 Lift and unlock the snap latch on the battery cover Pull the cover forward The cover is now removable 2 Install the four...

Page 10: ...g CDS 7 COS 7 CHS 7 cannot be used CAUTION Sensor unit Sensor port Sensor cover Connector Snap latch 8 5 2 Sensor Unit Installation 1 Lift and unlock the snap latch on the sensor cover Pull the cover forward The cover is now open this cover cannot be detached from the unit 2 Install a sensor unit in the detector by engaging with the connector and sensor port on the detector 3 Reinstall the sensor ...

Page 11: ...ERO button to perform a zero adjustment Ensure that the zero adjustment is done in clean air CAUTION 9 5 3 Power on 1 Press and hold the POWER button The unit gives off a long beep Then the green POWER LED starts flashing The warm up cycle 30 second self test followed by automatic zero adjustment starts 2 When the warm up cycle is completed the flashing POWER LED becomes steady indicating that the...

Page 12: ... software s instruction manual separate document for the procedure to transfer log data to a pc NOTE 10 6 Data Logging The detector can log up to 22 hours of the measurement data The log data can also be transferred to a pc by using data logger kit sold separately see 10 Consumable and Optional Parts on page 13 1 During normal operation press the button LoG appears on the LCD The log starting time...

Page 13: ...right bottom corner of the LCD They are just the ex factory parameters and not for customer use NOTE 11 7 Filter Element Replacement Replace the filter element with a new one if it is dirty or wet 1 Turn the retainer and short probe as a whole counterclockwise to remove them from the filter case 2 Remove the O ring from the filter case 3 Replace the filter element with a new one 4 Reinstall the O ...

Page 14: ...scheduled annual inspections once a year at least Cleaning Clean the exterior with a soft damp cloth 12 8 Maintenance Routine Check pre use check Perform a routine check before each use Check the tube of the gas sampling tube for damage or wear If any replace with a new one Check the filter element in the filter case Replace it with a new one if dirty or discolored Annual Inspection Contact New Co...

Page 15: ...ata to a pc Communication adapter CA 7 Serial cross cable KRS L09 2K Does not comply with CE marking 13 9 Troubleshooting Before contacting us for service repair perform basic troubleshooting using the table below If the detector locks up cannot be turned off remove all batteries After a few minutes put the batteries back in and turn on the detector Symptom Cause Action Reference Pressing POWER bu...

Page 16: ...om improper consumable replacement 5 Other failures and damages not attributable to the manufacturer 14 11 Warranty The warranty period is one 1 year from the date of purchase You are entitled to the limited warranty if the product malfunctions due to a manufacturing defect during normal use in accordance with the instruction manual specifications and labels Warranty Scope If the product fails or ...

Page 17: ...e are two types of EC 7 sensor stocker global and domestic for use in Japan Global type is CE marked 15 12 Specifications Target gas Semiconductor manufacturing gases Detection principle Electrochemical sensor Electrochemical pyrolyzer sensor Gas sampling method Extractive type pump Detection range As per delivery specifications Gas concentration display Four digit on LCD Indication accuracy 1 10 ...

Page 18: ...r its authorized representative for ordering The contents of this manual are subject to change without notice Authorized representative Manufacturer NEW COSMOS ELECTRIC CO LTD 2 5 4 Mitsuya naka Yodogawa ku Osaka 532 0036 Japan URL https www newcosmos global com XPS 7ⅡET 01 2008 050 ...

Reviews: