MTI Proforma 300EMI, User Manual

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013
20
3.1.8 Adjusting the Top Probe
The Proforma™ 300i or Proforma™ 300Gi was shipped with nominal probe spacing
to measure wafers between 100
µ
m and 1000
µ
m. By adjusting the top probe, it is
possible to measure thicknesses in excess of 1000
µ
m.
3.1.8.1 Remove the single Phillips screw holding the top probe cover.
3.1.8.2 Slide the top cover out. Note that the rear of the cover is engaged by two
guide pins.
3.1.8.3 Enter raw volts mode (Setup

Raw Volts

On). The display will now display
the voltage reported by the amplifier cards
MODE:Cont. CAL:500.0
VOLTS: TOP=10.00 BOTTOM=10.00
um
3.1.8.4 Using a 3/32” hex wrench, loosen the clamp screw, on the right hand side,
which secures the top probe. Do not loosen or remove the 3 Phillips heads
screws on the side bar.
3.1.8.5 Gently grasp the probe wires and lift the probe so that a median surface
calibration standard or median surface gauge block can be placed between
the probes.
3.1.8.6 Note that the witness mark on the top probe should face the front panel (i.e.
towards the operator). With the median surface between the probes,
carefully move the top probe into a position so that the top probe voltage
reads 5V±1V.
3.1.8.7 Verify the witness mark on the probe is in the correct location and tighten the
clamp screw.
3.1.8.8 Replace the top probe cover.
3.1.8.9 Recalibrate (Calibrate

Cal STD)
Cover Screw
Probe Holder
Cover
Phillips Head Screws
(Do not loosen or remove)
Probe Clamp Screw
3/16" Hex
Figure 10:Adjusting the Top Probe