MTI Proforma 300EMI, User Manual, Page: 8 / 32

MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013
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1 INTRODUCTION
1.1 Proforma™ 300i Series System Description
Proforma 300i utilizes MTI’s Push-Pull Capacitance technology to accurately and reliably measure Semi
Conducting, Semi Insulating, and Photovoltaic Wafers up to 300mm.
1.2 Proforma™ 300i Series Specifications
300i 300Gi 300OEMi
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Accuracy
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: ±0.25um ±0.25um ±0.25um
Repeatability
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: ±0.25um ±0.25um ±0.25um
Resolution: 0.05um 0.05um 0.05um
Response Time: 60ms 60ms Custom
Supported Wafer Sizes: 50-300mm 50-300mm Custom
Wafer Thickness Range: 100-1000um 100-1000um Custom
Known Supported Materials
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: Si, Ge, InP Si, Ge, GaAs, InP Si, Ge, InP
Weight: 12.3kg 12.4kg 5.9kg
Dimensions (LxWxH): 482x330x279mm 482x330x279mm 483x388x89mm
Temperature (Operational): 15-40ºC 15-40ºC 15-40ºC
Electrical Input (Voltage): 100-240VAC 100-240VAC 100-240VAC
Electrical Input (Frequency): 50-60Hz 50-60Hz 50-60Hz
Electrical Input (Power): 50Watts 50Watts 50Watts
Data Interfaces: LCD, RS232, LCD, RS232, RS232, Ethernet
Ethernet, USB Ethernet, USB
1.3 Receiving Inspection Procedure
The Proforma™ 300i series products are shipped from MTII fully assembled and packed in a cardboard
carton with foam supports to guard against shipping damage. If a heavy duty shipping case was ordered,
the product will be in the heavy duty shipping case and the heavy duty shipping case will be packed in a
cardboard carton. Upon receipt, perform the following procedure before using the unit to perform
dimensional measurements:
1) Inspect the exterior of the shipping carton. Note any obvious damage. If shipping damage is
evident, file a claim with the carrier.
2) Remove the product from the carton and inspect for damage. Do not lift the instrument by
grasping the LCD display or upper probe arm assembly.
3) If any problems were found contact MTII at 1-518-218-2550.
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The OEM model consists of the acquisition system and probes only. As such, several parameters will
be dependant on the custom installation parameters. Contact MTI Instruments to discuss custom
applications and expected performance in these applications.
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At constant 22ºC.
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Within limits of repositioning.
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The ability to measure can vary dependant on several factors (such as bulk resistivity).
CAUTION
The Proforma™ Series products are sensitive to Electrostatic Discharge (ESD). Use proper ESD
techniques when handling this product.
CAUTION
Do not move the Proforma™ 300i or Proforma™ 300Gi by grasping the display housing or the upper
probe arm.