MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013
12
Main Menu
Mode
Calibrate
Limits
Roundin
Setu
g
p
MODE:Cont.
626.3
CAL:383.1
Figure 9:Profoma™ 300i and 300Gi Display in Menu Mode
3.1.3
Keypad Functions
3.1.3.1
Save
When this button is pressed, data is saved to the location specified in the Setup
Export to
Menu.
3.1.3.2
Units
Default:
µ
m
This button toggles between
µ
m (microns or micrometers) or mils (thousandths of an inch).
When the display values are changed, all other setting values are converted as well.
3.1.3.3
Zero
Default: Zero Off
When this is selected, the current measured value is subtracted from all subsequent values.
This is also known as a Tare function.
3.1.3.4
Menu
This button opens up the top level menu.
3.1.3.5
Back (
)
This button will navigate back one level on the menu tree.
3.1.3.6
Left (
), Right (
), Up (
), Down (
) Arrows
These buttons are for navigation on the menu tree. They are also used to enter values, with
the left and right arrows navigating significance and the up and down arrows toggling values.
3.1.3.7
Select (
)
Use this key to select or confirm an entry.
3.1.4
Menu Items
3.1.4.1
Mode
Default: Continuous
3.1.4.1.1
Continuous
Measurements are taken continuously and displayed on the screen. This mode is often used
to scan for surface irregularities. It is also used in conjunction with the alignment pins to
provide accurate measurements of the center of a wafer.
3.1.4.1.2
5 Point
5 point is commonly used to take a measurement at the center of the wafer (using the
alignment pins) and 4 other points on the edge of the wafer located at 90º from each other. 5
point will toggle to the next reading when the
is pressed. At the end of the 5 point reading,
pressing the
will cause the statistics for the readings to be displayed (AVeraGe,
MAXimum, MINimum, TotalThicknessVariation, standardDEViation). Pressing the
key
anywhere during the 5 point operation will return the Proforma™ back to the start of the 5
point measurement process.
3.1.4.1.3
Bow
The Proforma™ 300i and the Proforma™ 300Gi products are capable of measuring wafer
bow in compliance with ASTM Specification F534
Standard Method for Bow of Silicon Slices
.
Bow measurements require the use of a 3 point wafer fixture (bow ring), which is available
from MTI Instruments.
Summary of Contents for Proforma 300EMI
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