MTI Proforma 300EMI, User Manual

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013
17
3.1.6.2 5-Point Mode
5-Point Mode is a special operational mode that is usually used to take
measurements at 5 distinct points on a wafer. Typically, these points are at
the center, then 0º, 90º, 180º, and 270º. For maximum accuracy, thickness
readings should be taken with the wafer steady and hands not contacting the
wafer.
To enter 5-Point Mode:
3.1.6.2.1 Press the MENU button on the front panel keypad..
3.1.6.2.2 Select Mode and press the

key.
3.1.6.2.3 Select 5-Point and press the

key. The screen will display MODE:5-
Point in the upper left hand corner. The lower left corner will display
ENTER to Measure Point #1.
MODE:5-Point CAL:500.0
um
SELECT To Measure Point #1
3.1.6.2.4 Place the wafer between the probe at position 1 and press the

key.
MODE:5-Point CAL:500.0
um
SELECT To Measure Point #2
505.2
505.2
3.1.6.2.5 Continue this process until all 5 points are measured. At the end of the
fifth measurement,

can be pressed to provide statistics on the
measurements. Pressing the BACK key will return the display to the 5
measurements. Pressing

from the statistics screen will begin a new
set of 5-Point measurements.
MODE:5-Point CAL:500.0
um
SELECT To View Statistics
505.2
505.7
505.7 505.8
504.9
505.1
MODE:5-Point CAL:500.0
um
SELECT To Measure Point #1
Average 505.3
505.7
TTV: 0.1
MAX:505.8
MIN:504.9 DEV: 0.4