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MKS UniMag 971, Operation And Installation Manual, Page: 3 / 44

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MKS UniMag 971 Operation And Installation Manual Download Page 3

 

 

 

 

 

Safety information .............................................................................................................................................. 2 

Symbols used: ............................................................................................................................................... 2 

Unpacking .......................................................................................................................................................... 3 
Description ......................................................................................................................................................... 4 
971 Functions .................................................................................................................................................... 5 
User Switch ........................................................................................................................................................ 5 
LED Status Indicator .......................................................................................................................................... 5 
Transducer installation (mechanical) ................................................................................................................. 6 
Transducer installation (electrical) ..................................................................................................................... 7 
Serial user interface ........................................................................................................................................... 9 
Communication Protocol.................................................................................................................................. 10 
Setpoint relays ................................................................................................................................................. 12 
Calibration and adjustment .............................................................................................................................. 17 
Factory default ................................................................................................................................................. 18 
Transducer lock function.................................................................................................................................. 19 
User Switch Command .................................................................................................................................... 19 
Transducer test ................................................................................................................................................ 19 
Status Query Commands ................................................................................................................................ 20 
Analog output ................................................................................................................................................... 21 
Query Command list ........................................................................................................................................ 26 
Setup and configuration command list ............................................................................................................ 27 
FAQ (Frequently Asked Questions) ................................................................................................................. 28 
Trouble shooting .............................................................................................................................................. 30 
Service and Repair .......................................................................................................................................... 31 
Specifications ................................................................................................................................................... 32 
Accessories and replacement part numbers ................................................................................................... 35 
CE Declaration of Conformity .......................................................................................................................... 36 
Notes   ............................................................................................................................................................ 38 
Index   ............................................................................................................................................................ 40

 

 

 
 
 
 

 
 
 
 
 
 
 
 
 
 
 
 

Summary of Contents for UniMag 971

Page 1: ...P N 100017131 971 UniMag Transducer Operation and Installation Manual Revision C January 2010...

Page 2: ...ed and approved in the handling and cleaning of contaminated materials before the product will be accepted by HPS TM for repair and or replacement In the course of implementing this policy HPS TM Cust...

Page 3: ...l 10 Setpoint relays 12 Calibration and adjustment 17 Factory default 18 Transducer lock function 19 User Switch Command 19 Transducer test 19 Status Query Commands 20 Analog output 21 Query Command l...

Page 4: ...MKS Denmark ApS Ndr Strandvej 119G DK 3150 Hellebaek Denmark Tel 45 44 92 92 99 Fax 45 44 92 94 99 E mail mksdenmark mksinst com MKS Instruments HPS Products 5330 Sterling Dr Boulder CO 80301 USA Tel...

Page 5: ...can cause permanent damage to the transducer or interference to measuring performance Refer to Electrical connections description page 7 Fuse The 971 power supply input has an internal thermal fuse T...

Page 6: ...and sensor sealing type Transducers can be delivered with customer configuration of various parameters like setpoint settings and these specials have additional 4 digits after the regular part number...

Page 7: ...ons are accelerated towards the anode and will ionize molecules by collision The magnetic field deflects the electrons causing them to spiral as they move across the magnetic field to the anode This s...

Page 8: ...s delivered with customer specified parameters the User Switch is disabled For enabling the switch see page 19 The red green LED status indicator has the following stages 1 GREEN Normal operation 2 2...

Page 9: ...temperature gradients and direct cooling like air condition air stream or direct heating like a pump exhaust stream Bake out The transducer electronics can withstand 85 o C 185 o F when the power is t...

Page 10: ...e analog out and negative analog out pins to a differential input voltmeter or an analog to digital A D converter Do not connect the negative side of the analog output to the negative side of the powe...

Page 11: ...the transducer 971 I O Connector P N 971 x1090 0001 6 pin Hirschmann PIN Description 1 Identification resistor 5 1K 2 Analog Output 3 Analog Output 4 Power 9 30 VDC 5 Power return 6 Chassis P N 971 x...

Page 12: ...quality and communication speed but relative long cable spans up to 1 200m 4 000 ft is possible There are 2 wires other than ground that are used to transmit the digital RS485 signal The 971 uses half...

Page 13: ...e the user enters into the command syntax Each query or command must begin with the attention character and end with the termination FF Command syntax for an information query device address query FF...

Page 14: ...nd all transducers will transmit a reply Commands sent with address 255 will be executed by all transducers on the network but the transducers will not transmit replies For example use address 254 to...

Page 15: ...izing spike protection Inadequate protection can cause permanent damage to the transducer or interfere with the analog output signal Always ensure that inductive inrush currents do not exceed relay co...

Page 16: ...6 00E 6 FF Reply 253ACK6 00E 6 FF 4 Enable setpoint OFF ON Command 253EN1 ON FF Reply 253ACKON FF Setpoint setup by PDR900 Controller 1 Edit Setpoint Setpoint 1 Setpoint Value 1 Enter set point value...

Page 17: ...KON FF Factory default ON The 971 with integrated display provides real time pressure readout pressure trend and setpoint status The display setup can be changed via the intuitive menu interface The s...

Page 18: ...er can either be momentarily pulse trigged or low level trigged Analog Level trig factory default When enabling level trig the cold cathode sensor will be on when pin 13 is shorten to ground pin 4 and...

Page 19: ...ion The digital pressure output can provide 3 digit or 4 digit values however the resolution is limited in certain parts of the measuring range 1 00E 7 to 1 00E 8 Torr 2 digits resolution 1 50E 8 5 00...

Page 20: ...process gases adjustment of zero and full scale can be executed to compensate for small measurement errors Pressure unit calibration The transducer can provide digital and analog output in torr mbar a...

Page 21: ...point 3 enable EN1 OFF Setpoint safety delay SPD ON Cold Cathode protect setpoint PRO OFF Switch enable SW OFF Analog out 1 AO1 30 1 1 If the transducer is delivered with other analog output than stan...

Page 22: ...transducer is delivered with special configuration the lock function will only be temporally disabled and will be enabled again after cycling power cycle or executing the enable lock command The 971...

Page 23: ...ry reply 253ACK971 FF Part Number PN Specifies transducer part number Query 253PN FF Query reply 253ACK971 11030 FF Serial Number SN Specifies transducer serial number Query 253SN FF Query reply 253AC...

Page 24: ...d from Torr to Pascal or mbar the analog output scaling will change as well so it represents 0 5 VDC decade Torr or 0 5 VDC decade mbar or Pascal Torr mbar Vout Torr mbar Vout 1 0E 8 1 5000 1 0E 5 3 0...

Page 25: ...g Change of analog output setup Command 253AO1 15 FF Command values 10 to 319 xy First digit x 1 PR1 Cold cathode pressure value assignment Second digit y 0 MKS Standard 0 5 VDC decade 1 Edwards APG L...

Page 26: ...2 3 16 7 00 7 50E 1 1 00 100 8 00 2 37 31 6 3 160 9 00 750 0 1 000 100 000 10 00 Analog output calibration 5 Inficon MPG400 Pfeiffer PKR251 emulation PTorr 10 Vout 11 46 1 667 Vout log10 PTorr 0 6 6 8...

Page 27: ...Edwards AIM S SL emulation provides a strongly non linear output Torr mbar Pascal Vout 1 00E 8 1 33E 8 1 33E 6 2 5 1 80E 8 2 40E 8 2 40E 6 2 5 4 40E 8 5 87E 8 5 87E 6 3 6 10E 8 8 13E 8 8 13E 6 3 2 8 3...

Page 28: ...67E 4 6 67E 2 8 656 1 00E 3 1 33E 3 1 33E 1 9 000 5 00E 3 6 67E 3 6 67E 1 9 799 Analog out calibration 18 Pfeiffer IKR251 The Pfeiffer AIM X XL emulation provides a log linear output Torr mbar Pascal...

Page 29: ...nt 1 3 hystereses switch value xxxEN1 FF xxxEN2 FF xxxEN3 FF xxxACKOFF FF Set point 1 3 enable status OFF PIR MicroPirani or CC Cold Cathode xxxSD1 FF xxxSD2 FF xxxSD3 FF xxxACKBELOW FF Set point rela...

Page 30: ...tion xxxBR 19200 FF xxxACK19200 FF Set communication Baud rate 4800 9600 19200 38400 57600 115200 230400 xxxAD 123 FF xxxACK123 FF Set transducer communication address 001 to 253 xxxRSD OFF FF xxxACKO...

Page 31: ...pressure cycles can the transducer withstand A Cold Cathode sensor element is very mechanical robust to pressure changes and there are no limits on the number of pressure cycles In applications where...

Page 32: ...sensor chamber can be cleaned using solvents compatible with 304 stainless steel 403 stainless steel Ceramic Al2O3 Viton and epoxy resin Q Can the sensor element be changed if contaminated A Yes the c...

Page 33: ...been executed Incorrect pressure value at high pressure Contaminated sensor Transducer repair required Other gas or gas trace present than transducer gas setting Cold Cathode does not provide measure...

Page 34: ...anode module can be changed from the flanges side without disassembling of the transducer The anode module p n 970 ANODEKIT is available as spare part The basic accuracy of the cold cathode sensor ca...

Page 35: ...nce 100 m max Setpoint relay contact endurance 30VDC 1A load 100 000 min Setpoint relay contact endurance 30VDC 0 2A load 2 000 000 min Setpoint relay response time 100 ms Materials exposed to vacuum...

Page 36: ...971 UniMag Operation manual 33 mm Inch mm Inch...

Page 37: ...971 UniMag Operation manual 34 mm Inch...

Page 38: ...25ft RS485 100013674 10 m 33ft RS485 PDR900 Connectors cables Part number Description 100010757 Setpoint Relay 3 pin connector 100013638 Analog output 8 pin connector 100013686 Analog output cable 3 m...

Page 39: ...disturbances characteristic of industrial scientific and medical RF equipment Class B Group1 Immunity EN 61000 4 2 Electrostatic discharge EN 61000 4 3 Radiated RF electromagnetic fields EN 61000 4 4...

Page 40: ...971 UniMag Operation manual 37...

Page 41: ...971 UniMag Operation manual 38...

Page 42: ...971 UniMag Operation manual 39...

Page 43: ...l volume 32 LED Status Indicator 5 Lock function 19 Magnetic interference 2 Manufacturer 20 Model 20 NAK Code 10 NAK180 13 19 30 Operating temperature 32 Part number 3 Part Number 20 PDR900 35 PDR900...

Page 44: ...P N 100017133 971 UniMag Transducer Operation and Installation Manual Revision C January 2010...

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