MKS UniMag 971, Operation And Installation Manual, Page: 27 / 44

971 UniMag ™ Operation manual 24
Analog output calibration = 6 (Inficon BPG400 emulation)
P
Torr
= 10
((Vout -7.75)/0.75)-0.125
V
out
= log
10
(P
Torr
+0.125) × 0.75 + 7.75
P
mbar
= 10
(Vout -7.75)/0.75)
V
out
= log
10
(P
mbar
) × 0.75
P
Pascal
= 10
(Vout -7.75)/0.75)+2
V
out
= log
10
(P
Pascal
– 2) × 0.75
Torr mbar Pascal Vout
1.00E-8 1.33E-8 1.33E-6 1.843
1.00E-7 1.33E-7 1.33E-5 2.593
1.00E-6 1.33E-6 1.33E-4 3.343
1.00E-5 1.33E-5 1.33E-3 4.093
1.00E-4 1.33E-4 1.33E-2 4.843
5.00E-4 6.67E-4 6.67E-2 5.367
1.00E-3 1.33E-3 1.33E-1 5.593
1.00E-2 1.33E-2 1.33E+0 6.343
1.00E-1 1.33E-1 1.33E+1 7.093
1.00E+0 1.33E+0 1.33E+2 7.843
1.00E+1 1.33E+1 1.33E+3 8.593
1.00E+2 1.33E+2 1.33E+4 9.343
7.60E+2 1.01E+3 1.01E+5 10.004
Analog out calibration = 16 (Edwards AIM-S /-SL)
The Edwards AIM-S / SL emulation provides a strongly non linear output.
Torr mbar Pascal Vout
1.00E-8 1.33E-8 1.33E-6 2.5
1.80E-8 2.40E-8 2.40E-6 2.5
4.40E-8 5.87E-8 5.87E-6 3
6.10E-8 8.13E-8 8.13E-6 3.2
8.30E-8 1.11E-7 1.11E-5 3.4
1.10E-7 1.47E-7 1.47E-5 3.6
2.20E-7 2.93E-7 2.93E-5 4
5.50E-7 7.33E-7 7.33E-5 4.6
7.40E-7 9.87E-7 9.87E-5 4.8
9.80E-7 1.31E-6 1.31E-4 5
1.30E-6 1.73E-6 1.73E-4 5.2
2.10E-6 2.80E-6 2.80E-4 5.6
3.40E-6 4.53E-6 4.53E-4 6
4.20E-6 5.60E-6 5.60E-4 6.2
5.20E-6 6.93E-6 6.93E-4 6.4
7.50E-6 1.00E-5 1.00E-3 6.8
9.00E-6 1.20E-5 1.20E-3 7
1.10E-5 1.47E-5 1.47E-3 7.2
2.20E-5 2.93E-5 2.93E-3 8
3.20E-5 4.27E-5 4.27E-3 8.4
4.30E-5 5.73E-5 5.73E-3 8.6
5.90E-5 7.87E-5 7.87E-3 8.8
9.00E-5 1.20E-4 1.20E-2 9
1.40E-4 1.87E-4 1.87E-2 9.2
2.5E-4 3.33E-4 3.33E-2 9.4
5.0E-4 6.67E-4 6.67E-2 9.6
1.3E-3 1.73E-3 1.73E-1 9.8
2.7E-3 3.60E-3 3.60E-1 9.9
7.5E-3 1.00E-2 1.00E+ 10
Cold cathode off, Vout = 1.5 VDC