MKS UniMag 971, Operation And Installation Manual, Page: 6 / 44

971 UniMag ™ Operation manual 3
Before unpacking your 971 UniMag transducer, check all surfaces of the packing material for shipping
damage. Inspect for visible damage. If found, notify the carrier immediately.
Please be sure that your 971 package contains these items:
Part number Description
971-xxxxx 971 Transducer
100017130 Short form manual
100017096 Documentation & Software CD
If any items are missing, please call MKS Customer Service at (800)345-1967 or (303)449-9861 or your local
MKS sales office or distributor.
The 971 UniMag part number system has 5 digits that identify flange, communication interface, analog
output type, I/O connector and sensor sealing type. Transducers can be delivered with customer
configuration of various parameters like setpoint settings and these specials have additional 4 digits after the
regular part number.
F
la
n
g
e
In
te
rf
a
ce
An
al
o
g
o
u
t
Co
n
n
e
ct
o
r
Rel
a
ys
E
n
cl
o
s
u
re
se
a
lin
g
971- 1 1 0 2 0 -
0 Standard / viton sealing
2 SUBD 15pinHD male / no relay
3 SUBD 15pinHD male / 3 relays
5 SUBD 15pinHD male / 3 relays / Dual Aout
8 RJ45/FCC68 8 pin (Edwards type)
9 Hirschmann 6 pin (Pfeiffer / Inficon type)
0 Standard mks
1 Edwards APG-L
3 Edwards WRG
5 Inficon MPG400 / Pfeiffer PKR251
6 Inficon BPG400 (999 DAC2)
1 RS232 / Analog
2 RS485 / Analog
0 Custom
2 KF25
7 CF2.75
9 KF40
Special versions
Part number
971-x1090-0001 Pfeiffer IKR251 pin and output compatible
971-x1080-0002 Edwards AIM-S pin and output compatible
971-x1080-0003 Edwards AIM-X pin and output compatible