MKS UniMag 971, Operation And Installation Manual, Page: 24 / 44

971 UniMag ™ Operation manual 21
V
out
=
log (P
Torr
) + 11
2
The 971 transducer provides a voltage output as function of pressure.
The standard output is 0.5 VDC/decade but can also be configured to emulate other analog outputs.
Analog output calibration = 0 (MKS standard 0.5 VDC/decade)
P
Torr
= 10
(2×Vout - 11)
P
mbar
= 10
((2×Vout - 11)
P
Pascal
=10
((2×Vout - 6)
The standard MKS analog output always provides 0.5 VDC/decade. If the transducer pressure unit is
changed from Torr to Pascal or mbar the analog output scaling will change as well, so it represents 0.5
VDC/decade Torr or 0.5 VDC/decade mbar or Pascal.
Torr/mbar Vout Torr/mbar Vout
1.0E-8 1.5000 1.0E-5 3.0000
2.0E-8 1.6505 2.0E-5 3.1505
4.0E-8 1.8010 4.0E-5 3.3010
6.0E-8 1.8891 6.0E-5 3.3891
8.0E-8 1.9515 8.0E-5 3.4515
1.0E-7 2.0000 1.0E-4 3.5000
2.0E-7 2.1505 2.0E-4 3.6505
4.0E-7 2.3010 4.0E-4 3.8010
6.0E-7 2.3891 6.0E-4 3.8891
8.0E-7 2.4515 8.0E-4 3.9515
1.0E-6 2.5000 1.0E-3 4.0000
2.0E-6 2.6505 2.0E-3 4.1505
4.0E-6 2.8010 4.0E-3 4.3010
6.0E-6 2.8891 5.0E-3 4.3494
8.0E-6 2.9515 OFF 5.0000
V
out
=
log (P
rmbar
) + 11
2
V
out
=
log (P
Pascal
) + 6
2