MKS Spectra 138A, Instruction Manual

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PAS Trolley Manual
LP101017 Rev 1.02
Page 10
Section 2.
Overview
This document concerns the Portable Analytical System (MKS Type
138A) as supplied by MKS Instruments (UK) Ltd. It is intended to
be used in conjunction with the Spectra RGA manual ‘Vac Check
Manual ’ (LP101010 Rev 2.0 Aug 98).
The system is an analytical instrument based on a Residual Gas
Analyser (RGA) intended to be used for vacuum system background
gas identification and leak checking.
The important features of the instrument are as follows:
•
Self contained (only requiring mains power connection).
•
Mobile.
•
Clean room compatible.
•
Dry pumping system (no pump oils).
•
Complete RGA control via external PC.
•
Available with 100, 200 and 300 amu mass ranges.
•
Available with faraday cup or electron multiplier detectors.
•
Atmospheric inlet (optional).
•
Bakeout heaters (optional).
•
Windows software (optional).
Caution
The MKS Portable Analytical System is a precision
instrument. Whilst every effort has been made to
make it portable and robust it should still be handled
with care.
Caution To ensure that the instrument performs reliably good
vacuum practice should be observed at all times.