MKS HPS 945 Series, Operation And Maintenance Manual

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8
Digital Pirani vacuum Sensor System
Typical Applications for the
Series 945 Pirani System
Measuring foreline and roughing pressures generated by
mechanical vacuum pumps
Controlling valves and pumps to automate system pump down
using the relay set points
Sensing abnormal pressure and taking appropriate security
measures using the relay set points
Controlling system pressure using the analog output as input to
an automatic pressure controller
Starting or stopping system processes using the relay set
points
Measuring pressures of backfilled gases in the range of 10 -4 to
10 +2 Torr
Activating high vacuum sensors at the high end of their
operating pressure range