MKS HPS 945 Series, Operation And Maintenance Manual

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Digital Pirani Vacuum Sensor System
Table of contents
Table of contents
Package Contents ..................................................................... 1
Symbols Used in this Manual .................................................... 2
Safety Precautions .................................................................... 3
Specifications ............................................................................ 5
Controller ................................................................................................. 5
Sensor Tube ...................................................................................... 6
Feature and Control Locations .................................................. 7
Typical Applications for the Series 945 Pirani System .............. 8
About the SensaVac® Series 945 Pirani Vacuum
Sensor System .......................................................................... 9
Installing the Series 945 Pirani System ................................... 10
Pirani Sensor Installation ....................................................................... 10
Location ........................................................................................... 10
Orientation ....................................................................................... 10
Contamination .................................................................................. 10
Vacuum Connection ......................................................................... 10
Pirani Controller Installation .................................................................... 11
Controller Mounting .......................................................................... 11
Connecting the Sensor to the Controller ........................................... 12
AC Power Cord ................................................................................ 12
Fuse Replacement ........................................................................... 13
Accessory Connector ....................................................................... 13
Relay Inductive Loads and Arc Suppression ................................... 14
Operating the Series 945 Pirani System.................................. 15
Reading Pressure ................................................................................... 15
Sensor Adjustment ................................................................................. 16
Calibrating for Zero and Atmosphere ...................................................... 17
Adjusting the Set Point ........................................................................... 17
Venting to Atmosphere ........................................................................... 17
Buffered Analog Output .......................................................................... 18
Use with Computers ............................................................................... 18
Leak Detection ....................................................................................... 18