MKS HPS 945 Series, Operation And Maintenance Manual

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6
Digital Pirani vacuum Sensor System
Display LED with 2 significant digits
(1 leading) and 1 signed exponent;
red,
3 /5"-high, 7-segment digits; LED
set point indicators; units shown in
either Torr, mbar, Pascal, or microns
Electronic Casing Aluminum, anodized
Dimensions 3¾" x 7" x 3¾"
(W x D x H) (96 mm x 178 mm x 96 mm)
Size ¼ DIN
Weight 2.2 lb (1.0 kg)
Sensor Tube
Calibration Gas
Air/nitrogen
Installation Orientation Any
Reproducibility 5% of indicated pressure @ T
const
Materials Exposed to Vacuum SS 304, platinum, alumina ceramic,
silver brazing alloy, nickel 200
Internal Volume 0.5 in. 3 (8.0 cm 3 ) maximum
Operating Temperature Range 0° to 50°C (32° to 122°F)
Maximum Bakeout Temperature 50°C (122°F)
Diameter 1.3 in. (34 mm)
Length 4.4 in. (112 mm)
Typical Weight (with KF Flange) 0.5 lb (0.2 kg)
Vacuum Connection KF 16
1
/8" NPT-M
with ½" compression seal option
8 VCR
®
-F (½")
1
1
/3" CF (non-rotatable)
2¾" CF (non-rotatable)
Ø 15.0 mm x 30.0 mm tubing
Ø 18.0 mm x 30.0 mm tubing
Design and/or specifications subject to change without notice.