MKS HPS 919 Series, Operation And Maintenance Manual

Page: 6 / 54

Hot Cathode Ionization High Vacuum Senor System
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual .................................................... 2
Symboles utilisés dans ce manuel .......................................................... 3
In dieser Betriebsanleitung vorkommende Symbole ................................ 4
Símbolos Usados en el Manual ............................................................... 5
Symbols Found on the Unit ....................................................... 6
Symboles apparaissant sur l’appareil ...................................................... 7
Am Gerät angebrachte Symbole ............................................................. 8
Símbolos que Aparecen en la Unidad ...................................................... 9
Safety Procedures and Precautions ........................................ 10
Mesures de Sécurité et Mises en Garde ................................................ 12
Sicherheitsvorschriften und Vorsichtsmaßnahmen ................................. 14
Procedimientos y Precauciones de Seguridad ....................................... 16
Specifications .......................................................................... 18
Controller ................................................................................................ 18
Sensor .................................................................................................... 20
Feature and Control Locations ................................................ 21
Typical Applications for the Series 919 Hot Cathode System .. 23
About the HPS ® Products Series 919
Hot Cathode Ionization System ............................................... 24
Installing and Setting Up the Series 919 Hot Cathode System 25
Hot Cathode Sensor Installation ............................................................. 25
Location ...................................................................................................................... 25
Orientation .................................................................................................................. 25
Contamination ............................................................................................................. 25
Vacuum Connection ................................................................................................... 25
Hot Cathode Controller Installation ......................................................... 25
Operating the Series 919 Hot Cathode System ....................... 30
Reading Pressure ................................................................................... 30
Using the Analog Output ........................................................................ 30
Adjusting the Set Points ......................................................................... 31
Adjusting the Filament Protection Limit .................................................. 32
Restarting the Filament .......................................................................... 32
Local Method .............................................................................................................. 32
Remote Method .......................................................................................................... 32
Setting the Sensor Sensitivity ................................................................ 33
Sensor Sensitivity for Different Pressure Units ...................................... 33
i
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com