manualshive.com logo in svg

MKS HPS 919 Series, Operation And Maintenance Manual

Share
Download
MKS HPS 919 Series Operation And Maintenance Manual Download Page 30

23

Hot Cathode Ionization High Vacuum Senor System

Typical Applications for the Series

919 Hot Cathode System

Measurement of high vacuum chamber pressures

Control of high vacuum systems and process
sequencing using a relay set point

Sensing abnormal pressure and taking appropriate security
measures using a relay set point

Controlling system pressure using an automatic pressure
control system

Starting or stopping system processes
with the relay set point

Measuring pressures of backfilled gases

Leak testing your vacuum system

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for HPS 919 Series

Page 1: ...s underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos...

Page 2: ...HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 3: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 4: ...High Vacuum Senor System HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System May 1997 Part 109190098 Rev B1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Page 5: ...mber is located on the rear panel of the Controller 1997 by MKS Instruments HPS Division Inc All rights reserved Inconel is a registered trademark of Inco Alloys International Inc SensaVac is a tradem...

Page 6: ...er 18 Sensor 20 Feature and Control Locations 21 Typical Applications for the Series 919 Hot Cathode System 23 About the HPS Products Series 919 Hot Cathode Ionization System 24 Installing and Setting...

Page 7: ...aintaining the Series 919 Hot Cathode System 37 Cleaning the Controller Front Panel 37 Servicing the Controller 37 Replacing a Power Fuse 37 Testing the Sensor 38 Accessories 39 Product Warranty 40 Ap...

Page 8: ...on High Vacuum Sensor System User s Manual The Series 919 System s Sensor and its connecting cable are sold separately Please refer to page 39 for necessary ordering information if you have not alread...

Page 9: ...r the like which if not correctly performed or adhered to could result in injury to personnel This sign denotes a hazard It calls attention to an operating procedure practice or the like which if not...

Page 10: ...non respect des consignes L indication signale un danger potentiel Elle est destin e attirer l attention sur une proc dure une utilisation une situation ou toute autre chose pr sentant un risque d en...

Page 11: ...ung zu K rperverletzung f hren kann Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eineArbeitsweiseodereine sonstigeGegebenheitaufmerksam deren unsachgem eAu...

Page 12: ...ervarse correctamente podr a causar lesiones a los empleados Esto s mbolo indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no realizarse u observarse correctamen...

Page 13: ...rent IEC617 2 No 020206 Caution hot surface IEC 417 No 5041 On Power IEC 417 No 5007 Frame or Chassis IEC 417 No 5020 Direct and Alternating Current Both IEC 417 No 5033 a Caution refer to accompanyin...

Page 14: ...tention surface br lante IEC 417 No 5041 Marche mise sous tension IEC 417 No 5007 Masse Ch ssis IEC 417 No 5020 Courant continu et alternatif IEC 417 No 5033 a Attention se reporter la documentation I...

Page 15: ...IEC 617 2 Nr 020206 Vorsicht Hei e Fl che IEC 417 Nr 5041 Ein Netz IEC 417 Nr 5007 Rahmen oder Chassis IEC 417 Nr 5020 Wechselstrom und Gleichstrom IEC 417 Nr 5033 a Vorsicht Bitte Begleitdokumente l...

Page 16: ...06 Precauci n Superficie caliente IEC 417 N 5041 Encendido alimentaci n el ctrica IEC 417 N 5007 Caja o chasis IEC 417 N 5020 Corriente continua y alterna IEC 417 N 5033 a Precauci n Consultar los doc...

Page 17: ...connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation Upon loss of the protective g...

Page 18: ...fied for such operation Service by qualified personnel only Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service perso...

Page 19: ...n d alimentation est indispensable pour une utilisation sans danger de l appareil En cas de d faut de terre toutes les pi ces conductrices accessibles y compris les boutons de commande ou de r glage q...

Page 20: ...isation D pannage effectu uniquement par un personnel qualifi L op rateur de l appareil ne doit pas enlever le capot de l appareil Le remplacement des composants et les r glages internes doivent tre e...

Page 21: ...nzuschlie en bevor es an den Eingangs bzw Ausgangsklemmen des Produkts angeschlossen wird Das Instrument kann nur sicher betrieben werden wenn es ber den Erdleiter des Netzkabels und einen Schutzkonta...

Page 22: ...einer Explosion vorzubeugen darf dieses Ger t nicht in der N he explosiver Stoffe eingesetzt werden sofern es nicht ausdr cklich f r diesen Zweck zertifiziert worden ist Wartung nur durch qualifiziert...

Page 23: ...amente instalada antes de conectarlo a las terminales de entrada o salida del instrumento Para garantizar el uso sin riesgos del instrumento resulta esencial que se encuentre puesto a tierra por medio...

Page 24: ...sivos Para evitar el riesgo de explosi n no usar este instrumento o en un entorno explosivo a no ser que haya sido certificado para tal uso Reparacionesefectuadas nicamenteport cnicos especializados L...

Page 25: ...titude 2000 m 6562 ft max InsulationCoordination Installation Overvoltage Category II PollutionDegree2 Mains Voltage Fluctuations not to exceed 10 Number of Channels 1 ProcessControl Two nonvolatile i...

Page 26: ...r 120 VAC T 0 63 A for 220 VAC T 0 50 A for 240 VAC all are 5 mm x 20 mm Display Green LED with 2 significant digits 1 leading and 1 digit signed exponent 7 segment digits 14 mm in height units shown...

Page 27: ...als Exposed to Vacuum 304 SS Inconel X 750 glass tungsten platinum nickel either yttria coated iridium or tungsten OperatingTemperatureRange 0 to 50 C 32 to 122 F BakeoutTemperature 300 C max with CF...

Page 28: ...Switch Display Push buttons Pressure Set Points Protection andSensitivity LED Digital Display ProtectionAdjustmentPotentiometer SensitivityAdjustmentPotentiometer Female 8 pin High Power D type Gauge...

Page 29: ...em Sensor 16 Top View Side View 3 Filament 1 Filament 2 Grid and Supports Ion Collector Sensor Vacuum Port and Flange 18 16 17 2 18 18 19 19 20 20 116 17 19 Artisan Technology Group Quality Instrument...

Page 30: ...ing a relay set point Sensing abnormal pressure and taking appropriate security measures using a relay set point Controlling system pressure using an automatic pressure control system Starting or stop...

Page 31: ...em control remote enable for filament and degas and burnout protection for the filament The protectionfeature guards the Sensor sfilament against damage in case of overpressure or a short circuit The...

Page 32: ...liquids from entering the Sensor Using a screen or porous filter at the port is helpful see Accessories p 39 Shield a Sensor located near an electron or ion source e g near an electron beam source or...

Page 33: ...oose assure adequate ventilation to the Controller with at least 1 inch left open above the top perforatedpanel For bench top use adhesive backed rubber pads are provided Remove the adhesive backing f...

Page 34: ...oller before plugging or unplugging a cable to the Sensor Connecting or disconnecting cables while the Controller is on may damage the Sensor The configuration of the cable pins is symmetrical as show...

Page 35: ...or to other Controllerfunctions Connect the following pins 9 10 or 13 to a TTL low voltage or to ground to Pin 9 Disable all Controller functions Sensor voltage and set point relays Pin 10 Turn on th...

Page 36: ...Controller detects LEC the monitor will be at a TTL high level The filament and degas power will automatically be disabled to protect the system LEC can indicate operation at too high of a pressure o...

Page 37: ...r is connected to the analog output signal This signal has a range of 1 to 9 V 1 V per decade and is proportional to the logarithm of pressure It follows the voltage versus pressure curve shown on the...

Page 38: ...relay contact at a particularpressure 1 Depress the set point push button SP1 or SP2 on the front panel See figure at left 2 Using a small screwdriver adjust the corresponding potentiometer until the...

Page 39: ...e which automatically shuts off the filament The protection level can be set between 10 6 and 10 2 Torr To adjust the protection level to a particular pressure 1 Depress the Protect push button on the...

Page 40: ...as specified by its manufacturer e g 9 0 x10 0 for the Series 919 Low PowerNudeSensor Sensor Sensitivity for Different Pressure Units Series 919 Controllers displaying units in Torr are shipped with t...

Page 41: ...start degas the filament must be turned on again To control degas with an external device such as a computer or remote switch set the Degas switch to remote to transfer control to the Accessory connec...

Page 42: ...s multiplied by the Sensor s nitrogen sensitivity The sensitivity range is between 4 and 50 Torr 1 Adjusting System Sensitivity for Another Gas To adjust the sensitivity control for direct pressure re...

Page 43: ...yed Sensitivities Relative to Nitrogen Gas Symbol Sensitivity St Air 1 00 Argon Ar 1 29 CarbonDioxide CO2 1 42 Deuterium D2 0 35 Helium He 0 18 Hydrogen H2 0 46 Krypton Kr 1 94 Neon Ne 0 30 Nitrogen N...

Page 44: ...e unit should be returned to HPS for repair Replacing a Power Fuse To change a Controller fuse 1 Unplug the power cord from the Controller 2 Insert a screwdriver blade under the tab to the left of the...

Page 45: ...ch not on 1 Sensor cable not connected 2 Contaminated Sensor 3 Current leak across dirty insulators inside Sensor 1 Verify power source and plug it in to the correct one 2 Turn power on 3 Replace fuse...

Page 46: ...0005980 KF 40 Y2 O3 coated Ir 100006841 2 CF Y2 O3 coated Ir 100006842 Mounting Hardware Kit Half rack 100005651 Nipple 2 CF with Screen 100883069 Power Cord 115 VAC 103150001 HPS Series 919 Hot Catho...

Page 47: ...red if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dange...

Page 48: ...ent Bayard Alpert sensors are available in tubed glass envelopes or mounted on elastomer or metal sealed flanges nude A glass envelope sensor tends to be favored because of its low cost and limited th...

Page 49: ...42 Hot Cathode Ionization High Vacuum Senor System Notes Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 50: ...sure is above 8 x 10 5 Torr In the pressure range of 8 x 10 5 to 1 x 10 4 Torr the emission is 100 mA or 1 mA dependent upon whether the pressure is increasing or decreasing respectively This prevents...

Page 51: ...etting and the sensitivity setting dependent upon which front panel display switch is pushed Display The data bits from the A D converter go to an EPROM that controls the segment drivers for the LED d...

Page 52: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 53: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 54: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

Reviews:

No comments

Brands by name

Popular brands

Load more brands