MKS HPS 919 Series Operation And Maintenance Manual Download Page 47

40

Hot Cathode Ionization High Vacuum Senor System

Product Warranty

Extent of the Warranty

MKS Instruments, HPS

®

 Product, Inc. (HPS

®

), warrants the HPS

®

 Series 919 Hot Cathode Ionization High

Vacuum Sensor System and its accessories to be free from defects in materials and workmanship for one
(1) year from the date of shipment by HPS

®

 or authorized representative to the original purchaser

(PURCHASER). Any product or parts of the product repaired or replaced by HPS

®

 under this warranty are

warranted only for the remaining unexpired part of its one (1) year original warranty period. After expiration
of the applicable warranty period, the PURCHASER shall be charged HPS

®

’ current prices for parts and

labor, plus any transportation for any repairs or replacement.
ALL EXPRESS AND IMPLIED WARRANTIES, INCLUDING THE IMPLIED WARRANTIES OF
MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE, ARE LIMITED TO THE WARRANTY
PERIOD. NO WARRANTIES, EXPRESS OR IMPLIED, WILL APPLY AFTER THIS PERIOD.

Warranty Service
The obligations of HPS

®

 under this warranty shall be at its option: (1) to repair, replace, or adjust the

product so that it meets applicable product specifications published by HPS

®

 or (2) to refund the

purchase price.
What Is Not Covered
The product is subject to above terms only if located in the country of the seller from whom the product
was purchased. The above warranties do not apply to:
I.   Damages or malfunctions due to failure to provide reasonable and necessary maintenance in
accordance with HPS

®

 operating instructions.

II.  Damages or malfunctions due to chemical or electrolytic influences or use of the product in working
environments outside the specification.
III. Fuses and all expendable items which by their nature or limited lifetime may not function for a year. If
such items fail to give reasonable service for a reasonable period of time within the warranty period of the
product; they will, at the option of HPS

®

, be repaired or replaced.

IV. Defects or damages caused by modifications and repairs effected by the original PURCHASER or third
parties not authorized in the manual.

Condition of Returned Products
HPS

®

 will not accept for repair, replacement, or credit any product which is asserted to be defective by the

PURCHASER, or any product for which paid or unpaid service is desired, if the product is contaminated
with potentially corrosive, reactive, harmful, or radioactive materials, gases, or chemicals.

When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of
humans, or is environmentally unsafe, it is the responsibility of the PURCHASER to have the product
cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated
materials before the product will be accepted by HPS

®

 for repair and/or replacement.

In the course of implementing this policy, HPS

®

 Customer Service Personnel may inquire of the

PURCHASER whether the product has been contaminated with or exposed to potentially corrosive,
reactive, harmful, or radioactive materials, gases, or chemicals when the PURCHASER requests a return
authorization. Notwithstanding such inquiries, it is the responsibility of the PURCHASER to ensure that no
products are returned to HPS

®

 which have been contaminated in the aforementioned manner.

Other Rights and Remedies
I.   These remedies are exclusive. HPS

®

 SHALL NOT BE LIABLE FOR CONSEQUENTIAL DAMAGES, FOR

ANTICIPATED OR LOST PROFITS, INCIDENTAL DAMAGES OR LOSS OF TIME, OR OTHER LOSSES
INCURRED BY THE PURCHASER OR BY ANY THIRD PARTY IN CONNECTION WITH THE PRODUCT
COVERED BY THIS WARRANTY, OR OTHERWISE. Some states do not allow exclusion or limitation of
incidental or consequential damage or do not allow the limitation on how long an implied warranty lasts. If
such laws apply, the limitations or exclusions expressed herein may not apply to PURCHASER.
II.  Unless otherwise explicitly agreed in writing, it is understood that these are the only written warranties
given by HPS

®

. Any statements made by any persons, including representatives of HPS

®

, which are

inconsistent or in conflict with the terms of the warranty shall not be binding on HPS unless reduced to
writing and approved by an authorized officer of HPS

®

.

III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights
which vary from state to state.
IV.  For HPS

®

 products sold outside of the U.S., contact your MKS representative for warranty information

and service.

Warranty Performance
To obtain warranty satisfaction, contact the following: MKS Instruments, HPS

®

 Division, Inc., 5330 Sterling

Drive, Boulder, CO 80301, USA, at phone number (303) 449-9861. You may be required to present proof of
original purchase.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for HPS 919 Series

Page 1: ...s underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos...

Page 2: ...HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 3: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 4: ...High Vacuum Senor System HPS Products Series 919 Hot Cathode Ionization High Vacuum Sensor System May 1997 Part 109190098 Rev B1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Page 5: ...mber is located on the rear panel of the Controller 1997 by MKS Instruments HPS Division Inc All rights reserved Inconel is a registered trademark of Inco Alloys International Inc SensaVac is a tradem...

Page 6: ...er 18 Sensor 20 Feature and Control Locations 21 Typical Applications for the Series 919 Hot Cathode System 23 About the HPS Products Series 919 Hot Cathode Ionization System 24 Installing and Setting...

Page 7: ...aintaining the Series 919 Hot Cathode System 37 Cleaning the Controller Front Panel 37 Servicing the Controller 37 Replacing a Power Fuse 37 Testing the Sensor 38 Accessories 39 Product Warranty 40 Ap...

Page 8: ...on High Vacuum Sensor System User s Manual The Series 919 System s Sensor and its connecting cable are sold separately Please refer to page 39 for necessary ordering information if you have not alread...

Page 9: ...r the like which if not correctly performed or adhered to could result in injury to personnel This sign denotes a hazard It calls attention to an operating procedure practice or the like which if not...

Page 10: ...non respect des consignes L indication signale un danger potentiel Elle est destin e attirer l attention sur une proc dure une utilisation une situation ou toute autre chose pr sentant un risque d en...

Page 11: ...ung zu K rperverletzung f hren kann Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eineArbeitsweiseodereine sonstigeGegebenheitaufmerksam deren unsachgem eAu...

Page 12: ...ervarse correctamente podr a causar lesiones a los empleados Esto s mbolo indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no realizarse u observarse correctamen...

Page 13: ...rent IEC617 2 No 020206 Caution hot surface IEC 417 No 5041 On Power IEC 417 No 5007 Frame or Chassis IEC 417 No 5020 Direct and Alternating Current Both IEC 417 No 5033 a Caution refer to accompanyin...

Page 14: ...tention surface br lante IEC 417 No 5041 Marche mise sous tension IEC 417 No 5007 Masse Ch ssis IEC 417 No 5020 Courant continu et alternatif IEC 417 No 5033 a Attention se reporter la documentation I...

Page 15: ...IEC 617 2 Nr 020206 Vorsicht Hei e Fl che IEC 417 Nr 5041 Ein Netz IEC 417 Nr 5007 Rahmen oder Chassis IEC 417 Nr 5020 Wechselstrom und Gleichstrom IEC 417 Nr 5033 a Vorsicht Bitte Begleitdokumente l...

Page 16: ...06 Precauci n Superficie caliente IEC 417 N 5041 Encendido alimentaci n el ctrica IEC 417 N 5007 Caja o chasis IEC 417 N 5020 Corriente continua y alterna IEC 417 N 5033 a Precauci n Consultar los doc...

Page 17: ...connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation Upon loss of the protective g...

Page 18: ...fied for such operation Service by qualified personnel only Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified service perso...

Page 19: ...n d alimentation est indispensable pour une utilisation sans danger de l appareil En cas de d faut de terre toutes les pi ces conductrices accessibles y compris les boutons de commande ou de r glage q...

Page 20: ...isation D pannage effectu uniquement par un personnel qualifi L op rateur de l appareil ne doit pas enlever le capot de l appareil Le remplacement des composants et les r glages internes doivent tre e...

Page 21: ...nzuschlie en bevor es an den Eingangs bzw Ausgangsklemmen des Produkts angeschlossen wird Das Instrument kann nur sicher betrieben werden wenn es ber den Erdleiter des Netzkabels und einen Schutzkonta...

Page 22: ...einer Explosion vorzubeugen darf dieses Ger t nicht in der N he explosiver Stoffe eingesetzt werden sofern es nicht ausdr cklich f r diesen Zweck zertifiziert worden ist Wartung nur durch qualifiziert...

Page 23: ...amente instalada antes de conectarlo a las terminales de entrada o salida del instrumento Para garantizar el uso sin riesgos del instrumento resulta esencial que se encuentre puesto a tierra por medio...

Page 24: ...sivos Para evitar el riesgo de explosi n no usar este instrumento o en un entorno explosivo a no ser que haya sido certificado para tal uso Reparacionesefectuadas nicamenteport cnicos especializados L...

Page 25: ...titude 2000 m 6562 ft max InsulationCoordination Installation Overvoltage Category II PollutionDegree2 Mains Voltage Fluctuations not to exceed 10 Number of Channels 1 ProcessControl Two nonvolatile i...

Page 26: ...r 120 VAC T 0 63 A for 220 VAC T 0 50 A for 240 VAC all are 5 mm x 20 mm Display Green LED with 2 significant digits 1 leading and 1 digit signed exponent 7 segment digits 14 mm in height units shown...

Page 27: ...als Exposed to Vacuum 304 SS Inconel X 750 glass tungsten platinum nickel either yttria coated iridium or tungsten OperatingTemperatureRange 0 to 50 C 32 to 122 F BakeoutTemperature 300 C max with CF...

Page 28: ...Switch Display Push buttons Pressure Set Points Protection andSensitivity LED Digital Display ProtectionAdjustmentPotentiometer SensitivityAdjustmentPotentiometer Female 8 pin High Power D type Gauge...

Page 29: ...em Sensor 16 Top View Side View 3 Filament 1 Filament 2 Grid and Supports Ion Collector Sensor Vacuum Port and Flange 18 16 17 2 18 18 19 19 20 20 116 17 19 Artisan Technology Group Quality Instrument...

Page 30: ...ing a relay set point Sensing abnormal pressure and taking appropriate security measures using a relay set point Controlling system pressure using an automatic pressure control system Starting or stop...

Page 31: ...em control remote enable for filament and degas and burnout protection for the filament The protectionfeature guards the Sensor sfilament against damage in case of overpressure or a short circuit The...

Page 32: ...liquids from entering the Sensor Using a screen or porous filter at the port is helpful see Accessories p 39 Shield a Sensor located near an electron or ion source e g near an electron beam source or...

Page 33: ...oose assure adequate ventilation to the Controller with at least 1 inch left open above the top perforatedpanel For bench top use adhesive backed rubber pads are provided Remove the adhesive backing f...

Page 34: ...oller before plugging or unplugging a cable to the Sensor Connecting or disconnecting cables while the Controller is on may damage the Sensor The configuration of the cable pins is symmetrical as show...

Page 35: ...or to other Controllerfunctions Connect the following pins 9 10 or 13 to a TTL low voltage or to ground to Pin 9 Disable all Controller functions Sensor voltage and set point relays Pin 10 Turn on th...

Page 36: ...Controller detects LEC the monitor will be at a TTL high level The filament and degas power will automatically be disabled to protect the system LEC can indicate operation at too high of a pressure o...

Page 37: ...r is connected to the analog output signal This signal has a range of 1 to 9 V 1 V per decade and is proportional to the logarithm of pressure It follows the voltage versus pressure curve shown on the...

Page 38: ...relay contact at a particularpressure 1 Depress the set point push button SP1 or SP2 on the front panel See figure at left 2 Using a small screwdriver adjust the corresponding potentiometer until the...

Page 39: ...e which automatically shuts off the filament The protection level can be set between 10 6 and 10 2 Torr To adjust the protection level to a particular pressure 1 Depress the Protect push button on the...

Page 40: ...as specified by its manufacturer e g 9 0 x10 0 for the Series 919 Low PowerNudeSensor Sensor Sensitivity for Different Pressure Units Series 919 Controllers displaying units in Torr are shipped with t...

Page 41: ...start degas the filament must be turned on again To control degas with an external device such as a computer or remote switch set the Degas switch to remote to transfer control to the Accessory connec...

Page 42: ...s multiplied by the Sensor s nitrogen sensitivity The sensitivity range is between 4 and 50 Torr 1 Adjusting System Sensitivity for Another Gas To adjust the sensitivity control for direct pressure re...

Page 43: ...yed Sensitivities Relative to Nitrogen Gas Symbol Sensitivity St Air 1 00 Argon Ar 1 29 CarbonDioxide CO2 1 42 Deuterium D2 0 35 Helium He 0 18 Hydrogen H2 0 46 Krypton Kr 1 94 Neon Ne 0 30 Nitrogen N...

Page 44: ...e unit should be returned to HPS for repair Replacing a Power Fuse To change a Controller fuse 1 Unplug the power cord from the Controller 2 Insert a screwdriver blade under the tab to the left of the...

Page 45: ...ch not on 1 Sensor cable not connected 2 Contaminated Sensor 3 Current leak across dirty insulators inside Sensor 1 Verify power source and plug it in to the correct one 2 Turn power on 3 Replace fuse...

Page 46: ...0005980 KF 40 Y2 O3 coated Ir 100006841 2 CF Y2 O3 coated Ir 100006842 Mounting Hardware Kit Half rack 100005651 Nipple 2 CF with Screen 100883069 Power Cord 115 VAC 103150001 HPS Series 919 Hot Catho...

Page 47: ...red if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that is dange...

Page 48: ...ent Bayard Alpert sensors are available in tubed glass envelopes or mounted on elastomer or metal sealed flanges nude A glass envelope sensor tends to be favored because of its low cost and limited th...

Page 49: ...42 Hot Cathode Ionization High Vacuum Senor System Notes Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 50: ...sure is above 8 x 10 5 Torr In the pressure range of 8 x 10 5 to 1 x 10 4 Torr the emission is 100 mA or 1 mA dependent upon whether the pressure is increasing or decreasing respectively This prevents...

Page 51: ...etting and the sensitivity setting dependent upon which front panel display switch is pushed Display The data bits from the A D converter go to an EPROM that controls the segment drivers for the LED d...

Page 52: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 53: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 54: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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