MKS HPS 919 Series, Operation And Maintenance Manual

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Hot Cathode Ionization High Vacuum Senor System
Installing and Setting Up the
Series 919 Hot Cathode System
Hot Cathode Sensor Installation
Location
Locate the Sensor where it can measure chamber or manifold pressure.
Installing the Sensor away from pumps and gas sources gives the most
representative pressure values.
Orientation
The Series 919 Hot Cathode Sensor can be installed and operated in any
position without compromising accuracy.
Contamination
Locate and orient the Sensor where contamination is least likely. For
example, if the Sensor is mounted directly above a source of evaporation, the
vapor could contaminate the filament wire and cause the calibration to shift.
Install the Sensor with the vacuum port facing down whenever possible to
keep particulates or liquids from entering the Sensor. Using a screen or
porous filter at the port is helpful (see Accessories, p. 39).
Shield a Sensor located near an electron or ion source (e.g., near an
electron beam source or in a sputtering system) to prevent inaccurate
pressure measurements.
Vacuum Connection
The Series 919 Hot Cathode Sensor is available with either a 2¾" CF (non-
rotatable) or a KF 40 flange. A Sensor with a KF flange and elastomer O-ring
is suitable only for pressure measurement down to 10
-7 Torr. Viton ® or another
fluor elastomer should be used.
Do not damage the electrodes or feed through when inserting the Sensor into
your system. Do not short the elements to one another, the chamber, or the
components inside the chamber.
Hot Cathode Controller Installation
Selecting a Line Voltage
A switch to change line voltage is located on the Controller's back panel
fuse box/AC power connector.
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