MKS HPS 917 Operation And Maintenance Manual Download

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HPS

Products Series 917

Pirani Vacuum Sensor System

OPERATION AND

MAINTENANCE MANUAL

Summary of Contents for HPS 917

Page 1: ...HPSTM Products Series 917 Pirani Vacuum Sensor System OPERATION AND MAINTENANCE MANUAL...

Page 2: ......

Page 3: ...Pirani Vacuum Sensor System HPS Products Series 917 Pirani Vacuum Sensor System AUGUST 1999 PART 109170020 REV B...

Page 4: ...l number is located on the back panel of the Pirani controller 1994 1996 by MKS Instruments Inc HPSTM Products Inc All rights reserved SensaVac is a trademark of MKS Instruments Inc Teflon is a regist...

Page 5: ...allation 10 Controller Mounting 10 Electrical Connection of the Pirani Sensor to the Controller 10 AC Power Cord 11 Fuse Replacement 12 Accessory Connector 12 Relay Inductive Loads and Arc Suppression...

Page 6: ...Pirani Vacuum Sensor System...

Page 7: ...er immediately Keep all shipping materials and packaging for claim verification Package Contents The first two symbols below located on your Series 917 Controller and or Sensor identify critical safet...

Page 8: ...r gases Take precautions to avoid overpressure during systembackfill When backfilling do not use the Series 917 Pirani System to read pressures above 100 Torr In a system which is filled with a pressu...

Page 9: ...and current rating Only qualified personnel should change line voltage or fuse ratings if required Outside of the U S use only a harmonized detachable cord set that has conductors with a cross section...

Page 10: ...eRange 10o to 55o C 14o to 131o F OperatingHumidity 95 maximum noncondensing InstallationCategory Overvoltage Category II PollutionDegree2 Number of Channels 1 Front Panel Controls 2 nonvolatile indep...

Page 11: ...aterials Exposed to Vacuum 304 stainless steel platinum alumina ceramic silver brazing alloy nickel 200 Internal Volume 0 5 in 3 8 0 cm3 maximum OperatingTemperatureRange 0o to 50o C 32o to 122o F Max...

Page 12: ...Point Indicators Power Cord Inlet w Fuse Holder Panel Mounting Fastener Holes Male 15 pin Accessory Port Female 15 pinGauge Port Slots for Optional Mounting Brackets Male Octal Socket Sensor Vacuum Po...

Page 13: ...own using the relay set points Sensing abnormal pressure and taking appropriate security measures using the relay set points Controlling system pressure using the analog output as input to an automati...

Page 14: ...iently accessed from the front panel and cable connections are hidden to the rear The Series 917 Pirani Controller is compatible with any HPSTM standard Pirani Sensor without loss of calibration accur...

Page 15: ...ght affect the tube s element For example if the Sensor is installed directly above a roughing pump in the system oil vapor could contaminate the tube s filament wire and cause the emissivity and the...

Page 16: ...or stand alone use Regardless of the method you choose assure adequate ventilation to the Controller with at least a inch left open above and below it Adhesive backed rubber feet are provided for benc...

Page 17: ...engths up to 500 feet Connect the cable to the rear of the Controller at the D sub port labeled Gauge Tighten the connector jackscrews into the mating screwlocks to ensure proper electrical connection...

Page 18: ...1 A 5 mm x 20 mm 90 to 130 VAC T 0 04 A 5 mm x 20 mm 210 to 250 VAC 4 Close and secure the fuse holder AccessoryConnector Relay set point contacts and the analog output voltage can also be accessed f...

Page 19: ...uppression If a set point relay is used to switch inductive loads e g solenoids relays transformers etc the arcing of the relay contacts may interfere with Controller operation or reduce relay contact...

Page 20: ...n the unit Turn the power on to display pressure or to operate the set point relays The graph below shows the Series 917 Pirani System s voltage output as a function of pressure for nitrogen helium an...

Page 21: ...330 2 0E 02 2 7E 00 0 422 0 340 0 371 3 0E 02 4 0E 00 0 491 0 400 0 429 4 0E 02 5 3E 00 0 552 0 444 0 481 5 0E 02 6 7E 00 0 606 0 485 0 527 6 0E 02 8 0E 00 0 657 0 520 0 569 7 0E 02 9 3E 00 0 702 0 55...

Page 22: ...inherent sensitivity to gas type makes it useful for detecting leaks It is a useful complement to a mass spectrometer leak detector which is most efficient in locating smaller leaks The Series 917 Pi...

Page 23: ...not recommended Leak testing can be done with a mechanical pump however they may cause cyclical variations in pressure with rotation of the vanes This shows up as a large background noise signal possi...

Page 24: ...n indicated This reading error could lead to a dangerous overpressure A system which is backfilled from a pressurized gas source should contain a safety device such as a burst disc Calibrating for Oth...

Page 25: ...e The Series 917 Pirani Controller is designed to be maintenance free under normal operation In the unlikely event that problems occur this section lists symptoms and associated possible causes With t...

Page 26: ...with an ohmmeter with less than 5 mA of current The resistance readings of a normal Sensor measured at atmospheric pressure and at room temperature 20 C are shown here Cleaning the Pirani Sensor Rough...

Page 27: ...103150012 1 8 NPT M with Compression 103150011 Seal Option 15 mm x 30 mm Tubing 103150016 18 mm x 30 mm Tubing 103150018 Power Cord 115 VAC 103150001 Seal Centering Ring Assemblies with Screen KF 16...

Page 28: ...id or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in...

Page 29: ...23 Pirani Vacuum Sensor System Notes...

Page 30: ...24 Pirani Vacuum Sensor System...

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