MKS HPS 917, Operation And Maintenance Manual

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Pirani Vacuum Sensor System
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual .................................................... 1
Safety Precautions and Other Procedures ................................ 2
Specifications ............................................................................ 4
Controller ................................................................................................. 4
Sensor Tube ............................................................................................ 5
Feature and Control Locations .................................................. 6
Typical Applications for the Series 917 Pirani System .............. 7
About the HPS™ Series 917 Pirani Vacuum Sensor System .... 8
Installing the Series 917 Pirani System ..................................... 9
Pirani Sensor Installation ........................................................................ 9
Location ............................................................................................................................ 9
Orientation ........................................................................................................................ 9
Contamination .................................................................................................................. 9
Venting to Atmosphere .................................................................................................... 9
Vacuum Connection ........................................................................................................ 9
Pirani Controller Installation .................................................................... 10
Controller Mounting ....................................................................................................... 10
Electrical Connection of the Pirani Sensor to the Controller ...................................... 10
AC Power Cord .............................................................................................................. 11
Fuse Replacement ........................................................................................................ 12
Accessory Connector ................................................................................................... 12
Relay Inductive Loads and Arc Suppression .............................................................. 13
Operating the Series 917 Pirani System.................................. 14
Reading Pressure ................................................................................... 14
Adjusting the Set Points ................................................................................................ 15
Buffered Analog Output ................................................................................................. 16
Use with Computers ...................................................................................................... 16
Leak Detection ............................................................................................................... 16
Using the Series 917 Pirani System with Other Gases ............ 18
Calibrating for Other Gases .................................................................... 18
Calibrating for Direct Measurement ........................................................ 18
Maintaining the Series 917 Pirani System ............................... 19
Troubleshooting and Service ................................................................... 19
Cleaning the Series 917 Pirani Controller Front Panel ............................. 19
Testing the Pirani Sensor ............................................................................................. 20
Cleaning the Pirani Sensor ........................................................................................... 20
Accessories ............................................................................. 21
Product Warranty ..................................................................... 22
Notes ....................................................................................... 23