MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
53
7.5.2 Removing the ion-source to clean or replace
The analyser design permits the removal of the ion source as one complete assembly for cleaning
or replacement. The ion source is easily aligned to the main analyser assembly, allowing easy
replacement without the need for special jigs.
Below is a list of the tools and equipment you will require. We recommend that you assemble the
following items before you start. Remember that the instrument is supplied with a tool kit that
contains some of the things you will need.
Small
jeweler’s screwdriver (2mm)
Pair of tweezers
Small pair of smooth jawed needle nosed pliers
Pair of clean cotton gloves
Clean bench on which to work
Ohmmeter
Clean container in which to put small parts
Pen and paper on which to make notes and sketches
1. Remove the analyser from the vacuum system, place it on the bench in an upright position
(holding the analyser in a small bench vice or analyser support stand is recommended).
2. If you are cleaning the ion-source, then you should follow the steps on removing the filaments
before continuing.
3. Loosen the M2 pan-head screws that secure the source connecting wires.
4. Loosen the two grub-screws highlighted in red that secure the ion-source, see Fig.1.
5. Carefully withdraw the source assembly from the filter, Fig.2.
Refer to the views on the following page.
Summary of Contents for HPQ3
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