
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
39
Reassembly
1. Re-fit the springs to the Inlet Flange, ensuring that they are not cross-threaded and inserted until the uppermost face
of the grub screw is flush with the face of the Inlet Flange.
2. Secure the Retaining Ring by using two of the three springs.
3. From the side without a spring fitted, slide the Ceramic Coupling under the Retaining Ring, paying attention to the
couplings orientation, which should be with the shouldered face uppermost.