MKS Baratron 631D Instruction Manual Download Page 2

 

WARRANTY 

Type 631D Equipment 

 
 

MKS Instruments, Inc. (

MKS

) warrants that for two years from the date of shipment 

the  equipment  described  above  (the  “equipment”)  manufactured  by 

MKS

  shall  be 

free from defects in materials and workmanship and will correctly perform all date-
related  operations,  including  without  limitation  accepting  data  entry,  sequencing, 
sorting, comparing, and reporting, regardless of the date the operation is performed 
or  the  date  involved  in  the  operation,  provided  that,  if  the  equipment  exchanges 
data  or  is  otherwise  used  with  equipment,  software,  or  other  products  of  others, 
such  products  of  others  themselves  correctly  perform  all  date-related  operations 
and  store  and  transmit  dates  and  date-related  data  in  a  format  compatible  with 

MKS

 equipment.  THIS WARRANTY IS 

MKS’

 SOLE WARRANTY CONCERNING 

DATE-RELATED OPERATIONS.  

For the period commencing with the date of shipment of this equipment and ending 
two  years  later, 

MKS

  will,  at  its  option,  either  repair  or  replace  any  part  which  is 

defective in materials or workmanship or with respect to the date-related operations 
warranty  without  charge  to  the  purchaser.  The  foregoing  shall  constitute  the 
exclusive  and  sole  remedy  of  the  purchaser  for  any  breach  by 

MKS

  of  this 

warranty.   

The purchaser, before returning any equipment covered by this warranty, which is 
asserted  to  be  defective  by  the  purchaser,  shall  make  specific  written  arrange-
ments  with  respect  to  the  responsibility  for  shipping  the  equipment  and  handling 
any other incidental charges with the 

MKS

 sales representative or distributor from 

which the equipment was purchased or, in the case of a direct purchase from 

MKS

with the 

MKS

 home office in Andover, Massachusetts, USA.   

This  warranty  does  not  apply  to  any  equipment  which  has  not  been  installed  and 
used  in  accordance  with  the  specifications  recommended  by 

MKS

  for  the  proper 

and normal use of the equipment. 

MKS

 shall not be liable under any circumstances 

for  indirect,  special,  consequential,  or  incidental  damages  in  connection  with,  or 
arising  out  of,  the  sale,  performance,  or  use  of  the  equipment  covered  by  this 
warranty.   

MKS

  recommends  that  all 

MKS

  pressure  and  flow  products  be  calibrated 

periodically (typically every 6 to 12 months) to ensure accurate readings.  When a 
product  is  returned  to 

MKS

  for  this  periodic  re-calibration  it  is  considered  normal 

preventative maintenance not  covered by any warranty. 

THIS  WARRANTY  IS  IN  LIEU  OF  ALL  OTHER  RELEVANT  WARRANTIES, 
EXPRESSED  OR  IMPLIED,  INCLUDING  THE  IMPLIED  WARRANTY  OF 
MERCHANTABILITY  AND  THE  IMPLIED  WARRANTY  OF  FITNESS  FOR  A 
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF 
ANY PATENT.    

 

 

 

              8/10 

   

 

 

 

 

 

 

 

1039281-001 

 

 

                 

This warranty is void if the product is installed using single or double metal ferrule compression 
type vacuum fittings, shown below.  These fittings are commonly tightened incorrectly, causing 
damage to the pressure sensor.  

SPECIAL NOTICE

Single Ferrule

Double Ferrule

Summary of Contents for Baratron 631D

Page 1: ...ron Type 631D High Temperature Pressure Transducer Instruction Manual 2 Technology Drive Andover MA USA 01810 2449 Main 978 645 5500 USA 800 227 8766 www mksinst com 1039281 001 REV B 03 13 Instructio...

Page 2: ...haser shall make specific written arrange ments with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor...

Page 3: ...1039281 001 Rev B 3 13 MKS Baratron Type 631D High Temperature Pressure Transducer...

Page 4: ...n is a registered trademark and Cluster Gauge is a trademark of MKS Instruments Inc Andover MA USA Swagelok VCR VCO and Ultra Torr are registered trademarks of Swagelok Company Solon OH USA Tri Clover...

Page 5: ...ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad del transductor de presi n 13 S mbolos usados en este manual de instrucciones 1...

Page 6: ...peration 37 How To Zero the Type 631 Transducer 37 How To Adjust the Zero Potentiometer 38 How To Adjust the Coarse Zero Switch 39 Heater Status LEDs and Heater Alarm Relay 40 Over Temperature Protect...

Page 7: ...Table of Contents v Environmental Specifications 50 Appendix B Model Code Explanation 51 Model Code 51 Index 55...

Page 8: ...Point Signal Output 44 Figure 9 LED and Relay State When Trip Point Direction Set Above Trip Point Value 45 Figure 10 LED and Relay State When Trip Point Direction Set Below Trip Point Value 45 Table...

Page 9: ...ike which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which...

Page 10: ...accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B 3 6 Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit O n S u p p l y I E C 4 1...

Page 11: ...acement and internal adjustments must be made by qualified service personnel only DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion do not operate this product in an explosive atmosphere unle...

Page 12: ...f any kind to enter the unit before or during use Contamination such as dust dirt lint glass chips and metal chips may permanently damage the unit USE CAUTION WHEN TOUCHING THE TRANSDUCER The transduc...

Page 13: ...Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger t hin Es macht auf eine...

Page 14: ...9 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ngige doppelte oder vers...

Page 15: ...rte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal Vorsicht beim Arbeiten...

Page 16: ...stallieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgrund von steigendem Sys...

Page 17: ...uation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle attire l...

Page 18: ...5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IE...

Page 19: ...uement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de pr...

Page 20: ...ppement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p n...

Page 21: ...procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilidad de producir da os al e...

Page 22: ...N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y alterna...

Page 23: ...CAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparaci n deben se...

Page 24: ...ima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de vac o para evitar qu...

Page 25: ...and signal access for each of the two trip points The 631D pressure transducer is comprised of a sensor and signal conditioner An MKS or compatible power supply is required to complete the pressure to...

Page 26: ...local environmental regulations in consideration of the chemicals and gases that this product has been exposed to How This Manual is Organized This manual is designed to provide instructions on how to...

Page 27: ...of your Type 631D instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS...

Page 28: ...Chapter One General Information 20 This page intentionally left blank...

Page 29: ...carrier and MKS immediately If it is necessary to return the unit to MKS obtain an RMA Number Return Material Authorization Number from the MKS Service Center before shipping Please refer to the insi...

Page 30: ...cer A Type PR4000B must also be equipped with the 1 5 Ampere output to be used with this Baratron Interface Cables As of July 20 2009 all products shipped to the European Community must comply with th...

Page 31: ...and electronics Overpressure limits 45 psia or 120 of sensor Full Scale whichever is greater Mount the Type 631D transducer components correctly refer to Figure 1 Recommended Orientation of the Type...

Page 32: ...t 150 ft min is REQUIRED for 200 C units if the ambient temperature is 40 to 50 C 104 to 122 F Ventilation requirements include sufficient air circulation Caution All high temperature equipment includ...

Page 33: ...ovide easy access for calibration Environmental Considerations The 631D high temperature transducer is designed to operate at its specified operating temperature To meet this high operating temperatur...

Page 34: ...llation following the steps in How To Zero the Type 631D Transducer page 37 If you anticipate vibration orient the plane of the diaphragm parallel with the major oscillating axis The edge of the diaph...

Page 35: ...hen needed to prevent sediment buildup When purging be sure to isolate the sensor from the interconnecting piping Sensor Fittings The following additional fittings are available for the Type 631D tran...

Page 36: ...Chapter Two Installation 28 This page intentionally left blank...

Page 37: ...with pressure and provides a 0 VDC output at Zero pressure and a 10 VDC output at sensor Full Scale Instrument Components and Dimensions The 631D transducer has two adjustments for zero a potentiomete...

Page 38: ...nctionality as the transducer without the relay system described above The relay system brings an additional two LEDs two adjustment POTs and three test plugs to the top of the transducer Refer to Fig...

Page 39: ...e relay is turned OFF depending on the relationship between the pressure output and the trip point value Refer to Chapter Five Optional Solid State Relay System page 43 for a complete description of t...

Page 40: ...Chapter Three Overview 32 Figure 4 Dimensions of the Type 631D Transducer Note All dimensions are nominal and are listed in inches with millimeters referenced in parentheses Coarse Zero Switch...

Page 41: ...To use a 631D transducer with any non MKS power supplies or power supply readouts consult the manufacturers specifications for electrical and power considerations and Appendix A Product Specification...

Page 42: ...hes the fixed capacitor plate The capacitor plate serves as a protective overpressure stop to prevent damage to the diaphragm up to 45 psia for an absolute transducer Note The output signal of the 631...

Page 43: ...ure 6 The Caution Hot Label page 35 shows the location of the Caution Hot label Figure 6 The Caution Hot Label Serial Number Label The serial number label contains the serial number and specific model...

Page 44: ...Chapter Three Overview 36 This page intentionally left blank...

Page 45: ...ro Switch page 39 To achieve the full dynamic range specified for the transducer the zero adjustment must be made at a pressure less than the transducer s resolution refer to Table 7 Highest Pressures...

Page 46: ...Pressure for Zeroing Torr 1 0 5 x 10 5 2 1 0 x 10 5 10 5 x 10 4 30 1 5 x 10 3 100 5 x 10 3 1000 5 x 10 2 Table 7 Highest Pressures Suggested for Proper Zero Adjustment 4 Adjust the ZERO potentiometer...

Page 47: ...For best results pump the transducer while it is warming up Refer to Table 7 page 38 for the highest recommended pressure levels for proper zero adjustment 4 Center the ZERO potentiometer located at t...

Page 48: ...ature 150 C or 200 C and is used for a gross indication the sensor is within acceptable limits The actual operating temperature of the sensor is maintained within a significantly tighter range If the...

Page 49: ...within LED temperature window 3 Heater current ON or OFF Green Off Energized Pin 13 Open Pin 14 Closed 1 Power ON 2 Temp above upper limit of LED temperature window 3 Temp below overtemperature cutoff...

Page 50: ...Chapter Four Operation 42 This page intentionally left blank...

Page 51: ...uses the contact pins of both trip point relays to equip the user with remote indication of the relay status The three pins of each relay produce an open closed output for example if Trip Point A is t...

Page 52: ...e two relays can be set to trip in the same or in opposite directions The customer can choose the direction of each trip point relay using the appropriate model code see Appendix B Model Code Explanat...

Page 53: ...s shown in Figure 10 Figure 10 also depicts the relay being turned ON when the initial pressure condition applied to the unit is below the trip point value IF Initial Pressure Trip Point Value TRIP PO...

Page 54: ...Chapter Five Optional Solid State Relay System 46 This page intentionally left blank...

Page 55: ...that you Zero the unit regularly Follow the procedure described in How To Zero the Type 631D Transducer page 37 on a regular basis Schedule re calibration annually Follow an annual recalibration sche...

Page 56: ...s 15 VDC 5 1 0 Amps Verify that the total current being drawn by the manometer is within the specifications of the power supply Check the signal terminals for the correct polarity Measure the loop imp...

Page 57: ...g options may be made from 300 series stainless steel Number of Decades Covered 4 Optional Trip Point Relay Setting Output 0 to 10 VDC corresponding to 0 to 100 F S for each trip point Optional Trip P...

Page 58: ...ntal Specifications Ambient Operating Temperature Range 150 C Units 200 C Units 10 to 50 C 50 to 122 F Minimum 50 ft min air flow is required if the ambient temperature is between 45 to 50 C 113 to 12...

Page 59: ...31D WW X Y Z T UV Type Number Full Scale Range Engineering Units Fitting Accuracy Temperature Trip Points Type Number 631D This designates the model number of the instrument Full Scale Range WW The fu...

Page 60: ...erature of the transducer is specified by a single letter Ordering Code 150 C H 200 C P Trip Points UV The optional relay system is specified by a two letter code When ordering without the relay syste...

Page 61: ...Appendix B Model Code Explanation 53...

Page 62: ...Appendix B Model Code Explanation 54 This page intentionally left blank...

Page 63: ...ity storage 24 50 I Input power 17 23 48 49 Interface cables 17 22 L Labels 34 35 hot 35 serial number 35 wiring diamgram 34 M Maintenance 47 Manual organization 18 Model code 51 Mounting 25 26 O Outp...

Page 64: ...ature coefficients 50 operating ambient 24 25 50 operating sensor 17 40 49 52 storage 24 50 Time response 50 Trip point relay system 17 29 43 direction 43 44 53 hysteresis 45 value 43 53 Troubleshooti...

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