MKS 943 Series, Instruction Manual

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3 Specifications
16
Series 943 Cold Cathode Vacuum Sensor
Instruction Manual - #100009887
3.4 Specifications
Table 3-1 Specifications for the Series 943 Digital, Cold Cathode Vacuum Sensor
Parameter Specification
Performance
Measurement Range for N
2
/ Air
(1)
Do NOT use this product with
flammable or explosive gases.
Torr: 1.0 x 10
-2
to 1.0 x 10
-10
mbar: 1.3 x 10
-2
to 1.3 x 10
-10
Pascal: 1.3 to 1.3 x 10
-8
Useful setpoint range
Torr: 9.0 x 10
-3
to 2.0 x 10
-9
mbar: 1.2 x 10
-2
to 2.7 x 10
-9
Pascal: 1.2 to 2.7 x 10
-7
Calibration Gas Air/nitrogen
Physical
Display
Resolution
Units
U pdate rate
Red LED, 7-segment digits 14 mm in height, ±60° viewing angle
2 digits (1 leading) with 1½-digit signed exponent
Torr, mbar,or Pascal
250 msec
Operating Power 100 to 120 VAC, 50/60 Hz or 230 VAC, 50/60 Hz, 9W
Output Voltage Buffered: 0 to 9 Vdc
Logarithmic: 1 to 9 Vdc (1 V / decade)
Process Controls 2 independent adjustable relay set points
Relay Contact Rating SPDT, 1 A @ 30 VAC or 24 Vdc
Relay Response
50 msec for pressures >10
-8
Torr
Case Material Aluminum, anodized
Materials exposed to vacuum 304 stainless steel, platinum, glass, nickel
Weight (with CF Flange) 2.3 lb (1.04 kg)
Insulation Coordination Installation (Overvoltage) Category II, Pollution Degree 2
Dimensions
(W x D x H)
3¾" x 7" x 3¾" (96 mm x 178 mm x 96 mm)
Size 1/4 DIN
Typical Weight (with KF Flange) 2.2 lb (1 kg)
Altitude 2000 m (6561 ft) maximum
Operating Temperature 5 ° to 40 °C (41 ° to 104 °F)
Operation Humidity 80% maximum for temperatures less than 31°C, decreasing
linearly to 50% maximum at 40°C
CE Certification EMC Directive
Low Voltage Directive
Sensors
Cold Cathode Sensor Type
Series 421 or Series 423 I-MAG
®
isolated collector, inverted
magnetron
Response Time 40 msec
Reproducibility 5% of indicated pressure at constant temperature
Calibration Gas Air/nitrogen
Installation Orientation Any ( port down suggested )
Materials Exposed to Vacuum Series 421 - Stainless steel, Al 6061, silver-copper brazing alloy,
alumina ceramic, Elgiloy
®
, OFHC
®
copper Series 423 - SS 302,
SS 304, glass, Al, Inconel
®
X-750, alumina ceramic
Internal Volume
Series 421 - 1.8 in.
3
(30 cm
3
)
Series 423 - 0.9 in.
3
(15 cm
3
)