3
Specifications
15
Series 943 Cold Cathode Vacuum Sensor
Instruction Manual - #100009887
Chapter 3
3
Specifications
3.1 General Description
The Series 943 Digital, Cold Cathode Vacuum Sensor System provides accurate and reliable data
for processes which need pressure measurement from 10
-2
Torr up to 10
-10
Torr. The System is easy
to use and is designed for versatility, reliability, and economy.
3.2 Intended Use / Applications
The Series 943 Controller is useful either as a small system controller or as a module in more
sophisticated pressure control environments. The Controller features two standard relay set points
for process applications and a high voltage set point (protect set point) to protect a sensor at higher
pressures.
• Measurement of high vacuum chamber pressures
• Control of high vacuum systems and process sequencing using relay set points
• Sensing abnormal pressure and taking appropriate security measures using relay set points
• Controlling system pressure using analog output as input to an automatic pressure controller
• Starting or stopping system processes with relay set points
• Measuring pressures of backfilled gases
These instruments are to be used only in accordance with the instructions in this operation manual.
3.2.1 Improper Use
• Removal of any factory installed components.
• Modifying any factory installed components.
• Removal of any labeling or warranty seals.
3.3 Storage
• Store the Mini-Ion gauge assembly indoors between -40
o
C to +70
o
C (-40
0
F to 158
0
F).
• Bag the assembly in a sealed or shrink wrapped bag with desiccant.
• All of the components should be bagged and boxed together along with the instructions for
future reference.
