Series 905
Page 5
Design Guide
905 MicroPirani™ Sensor Kit specifications
Measurement range
1 × 10
-5
to 760 Torr
1
1 × 10
-5
to 1000 mbar
1 × 10
-3
to 1 ×10
+5
Pascal
Measurement accuracy
5%
2
Pressure units (user selectable)
Torr, mbar, Pascal
Supply voltage
+5VDC (±2%)
Supply current
45 mA
Digital user interface
Serial UART, TTL level
Analog output range
0.5 VDC - 4.5 VDC
Analog output impedance
100 Ohms
Set point outputs
3 (open collector)
Set point sink current
50 mA
Operating temperature
5° to 40°C (41° to 104°F)
Storage temperature
-10° to 55°C (14° to 131°F)
Sensor bakeout temperature
130°C (266°F)
Material exposed to vacuum
Silicon, SiO
2
, SiN
4
, Epoxy, Gold
Weight (electronics module)
9 grams
Mounting electronics
DIP 28 Pin socket
Mounting electronics pins
0.45 mm diameter
Sensor cable connector
Omron Rotary backlock type
P/N: XF2M-1015-1A
0.5mm pitch, 10 pins, gold plated contacts.
Sensor cable
Flexible flat cable with 0.5mm pitch and 10 pins.
(See documentation for the cable connector)
Electronics dimensions
47.8 × 20.8 mm (1.882 x 0.820 in)
MicroPirani™ electronics module pinout.
Figure 3 - Electronics module (seen from above)
1. MP Sensor pin1
2. AGND
3. MP Sensor pin2
4. AGND
5. MP Sensor pin3
6. Differential analog Out+
7. Differential analog Out-
3
8. Activity LED
9. GND
10. GND
11.
μ
P PSEN
12. Set point 1, open collector
13. Set point 2, open collector
14. Set point 3, open collector
15. GND
16. RS485 enable
17. +5V supply
18. +5V supply
19. Remote zero switch
20. TxD (TTL)
21. RxD (TTL)
22. Microprocessor reset
23. N/C
4
24. N/C
4
25. N/C
4
26. N/C
4
27. N/C
4
28. N/C
4
1
Zero offset can impact measurement accuracy in the 10
-5
and low 10
-4
Torr/mbar decade and consequently
zero adjustment may be required in some applications for repeatable measurement.
2
Typical measuring accuracy from 1 × 10
-3
to 100 Torr Nitrogen pressure measured at 25°C.
3
This pin is actually analog ground, but is referred to as the negative analog output.
4
Reserved for future use. Do not connect.
