MKS 905 MicroPirani Design Manual Download Page 35

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Series 905

Page 31

Design Guide

Ordering information

905 MicroPirani™ Sensor Kits

Part Number

Description

905-0001

905 Evaluation Board, KF16 Flange (without Power Supply)

905-0002

905 Evaluation Board, KF16 Flange (with Power Supply)

905-0003

905 Electronics Module, Nude Sensor

905-0004

905 Electronics Module, Sensor Board, 200mm Flexible Flat Cable

Sensor Cables

Part Number

Description

100013955

Sensor Cable, FFC, 50mm

100013956

Sensor Cable, FFC, 100mm

100013811

Sensor Cable, FFC, 200mm

100013957

Sensor Cable, FFC, 300mm

Manual

Part Number

Description

100013905 Design

Guide

100013818 Short

Documentation

Accessories

Part Number

Description

PDR900-11-US

PDR 900 Single Channel Controller, RS232/RS485, US

PDR900-11-EU

PDR 900 Single Channel Controller, RS232/RS485, EU

PDR900-11-UK

PDR 900 Single Channel Controller, RS232/RS485, UK

PDR900-11-JP

PDR 900 Single Channel Controller, RS232/RS485, JP

100013613

Cable, RS232, PDR900, 9 pin, 10 ft. (3m)

100013614

Cable, RS232, PDR900, 9 pin, 16 ft. (5m)

100013515 Cable,

RS232, PDR900, 9 pin, 25 ft. (7.6m)

100013616

Cable, RS232, PDR900, 9 pin, 33 ft. (10m)

100013903

Series 900 Transducer Data Logger Software

100013782

MicroPirani™ Sensor Viton O-Ring

100013951

MicroPirani™ Sensor Protection Cap

Note: 905 evaluation units contains the items mentioned in “Package contents” on page 2.

Figure 24 - The PDR900 single channel controller

Summary of Contents for 905 MicroPirani

Page 1: ...905 MicroPirani TM Sensor Kit RS232 RS485 Design Guide P N 100013905 Revision A September 2007...

Page 2: ...e it is the responsibility of the PURCHASER to have the product cleaned by an independent agency skilled and approved in the handling and cleaning of contaminated materials before the product will be...

Page 3: ...t cable 12 Regular cable 13 Printed circuit board connection 13 Installing the MicroPirani sensor 13 Communication 14 Example configuration for RS232 and RS485 14 The signal RS485_ENABLE 14 Analog Out...

Page 4: ...t Point Status SS1 SS2 SS3 28 Calibration and Adjustment Commands 29 Atmospheric Calibration ATM 29 Gas Type Calibration GT 29 Vacuum adjustment VAC 29 How the MicroPirani Sensor Works 30 Ordering inf...

Page 5: ...Series 905 Page 1 Design Guide Symbols used in this manual Failure to read message could result in damage to the equipment Calls attention to important procedures practices or conditions...

Page 6: ...1 1 1 905 0004 1 1 1 1 1 If any items are missing please call MKS Customer Service at 800 345 1967 or 303 449 9861 or your local MKS sales office or distributor Inspect for visible damage If found not...

Page 7: ...sily be integrated on a printed circuit board together with other electronics The sensor module can either be wired through the circuit board or connected by a flexible flat cable from the electronics...

Page 8: ...path of molecules The size of mass spectrometers is constantly shrinking and the sensor kit significantly reduces space taken by traditional vacuum gauges allowing more compact equipment design Pumpi...

Page 9: ...s Sensor cable Flexible flat cable with 0 5mm pitch and 10 pins See documentation for the cable connector Electronics dimensions 47 8 20 8 mm 1 882 x 0 820 in MicroPirani electronics module pinout Fig...

Page 10: ...Series 905 Page 6 Design Guide Electronics module dimensions Figure 4 Dimensions millimeters inches MicroPirani sensor and board dimensions Figure 5 Dimensions millimeters inches...

Page 11: ...DSUB connector or via screw terminals jumper selectable Onboard 5V switchmode powersupply with wide voltage range input Microprocessor reset switch for external watchdog 9 pin DSUB connector for conne...

Page 12: ...rt RxD int ext Chooses between the RxD screw terminal TTL directly from the module or DSUB connector RS232 or RS485 as receiver TxD int ext Chooses between the TxD screw terminal TTL directly from the...

Page 13: ...been done to ensure that a correct connection is established regardless of the way the cable is mounted which allows total freedom when connecting the sensor to the electronics Connecting the electro...

Page 14: ...ication port usually COM1 or 2 and set it to 9600bps 8 bits no parity 1 stop bit and no flow control If possible turn on local echo which enables the user to see what is being typed Type in the follow...

Page 15: ...step down converter from National Semiconductor It s basic configuration can be seen on the picture below It can accept a voltage input between 9 and 30V More information on this and other switch mod...

Page 16: ...connections connect to pins 2 and 4 on the electronics module This is how the pins on the MicroPirani have been placed Figure 10 MicroPirani sensor connections bottom view The cable or printed circui...

Page 17: ...ny direction because the sensor was designed to minimize convection so that the operation is possible in any position without compromising accuracy It should be located where it can measure chamber or...

Page 18: ...this purpose because it can be configured for both types of communication with three pins Figure 14 RS232 configuration Figure 15 RS485 configuration The picture above shows the configuration for eac...

Page 19: ...e side of the analog output to the chassis ground or to any other ground Measurement errors in the output voltage may be seen due to the voltage drop from this current loop flow The longer the cable t...

Page 20: ...gh for calibrating zero On the evaluation board the switch simply connects the pin to ground when pressed down Pressure Torr mbar Output V Pressure Torr mbar Output V 1 0 10 5 0 500V 1 0 10 1 2 500V 2...

Page 21: ...nics module is supplied with 5VDC from the power supply This voltage is both used to supply the microprocessors digital I O and the analog part with MicroPirani bridge circuit ADC and analog output Th...

Page 22: ...tegrated on the evaluation board and will have to be added when the electronics module is integrated in a system Otherwise the spikes from the relay coil will damage the transistor and or microcontrol...

Page 23: ...d the electronics module is ready with the new firmware installed If a communications error occur it may be necessary to increase the paramter ms wait This communications delay is system dependent but...

Page 24: ...l blink once if the pressure is too high for calibrating zero Venting to Atmosphere The MicroPirani sensor can be vented to atmosphere very rapidly without damage to the sensor element This is an impr...

Page 25: ...ough either TTL RS232 or RS485 serial communication all available on the evaluation board All forms of communication uses the same commands to communicate with the kit however RS485 allows communicati...

Page 26: ...etting according to the value the user types in the command syntax Each query or command must begin with the attention character and end with the termination string FF Syntax required for a query is d...

Page 27: ...same rate Values 2400 4800 9600 19200 38400 115200 default 9600 Query 253BR FF Query Response 253ACK9600 FF Command 253BR 19200 FF Command Response 253ACK19200 FF Factory Default FD The basic FD comma...

Page 28: ...FF Command Response 253ACKON FF Unit U The U command returns or sets the pressure unit to Torr mBar or Pascal The units affect all pressure measurements and the set point values The analog output will...

Page 29: ...ardware version Query 253HV FF Query Response 253ACK1 00 FF Manufacturer MF The MF command returns the 905 manufacturer Query 253MF FF Query Response 253ACKMKS DENMARK FF Model MD The MD command retur...

Page 30: ...e independent set points which can be used for process control or surveillance The set points can be turned on or off with the Enable set point command The 905 automatically sets and overwrites any us...

Page 31: ...red Values Two or three digit scientific notation default 1 00E0 Torr Query 253SP1 FF Query Response 253ACK1 00E 2 FF Command 253SP1 1 00E 3 FF Command Response 253ACK1 00E 3 FF Hysteresis Value SH1 S...

Page 32: ...and 10 of set point value is if set point direction command is above See Set Point Value SP1 SP2 SP3 and Hysteresis Value SH1 SH2 SH3 above Values BELOW ABOVE default BELOW Query 253SD1 FF Query Respo...

Page 33: ...ion GT The GT command sets gas type for measurement The MicroPirani measures thermal conductivity using the gas calibration compensates for gas errors Values NITROGEN AIR ARGON HYDROGEN HELIUM H20 def...

Page 34: ...each gas to be measured The traditional Pirani sensor suffers from various problems According to its functional principle this type of sensor is sensitive to changes in ambient temperature Figur 1 Th...

Page 35: ...100013818 Short Documentation Accessories Part Number Description PDR900 11 US PDR 900 Single Channel Controller RS232 RS485 US PDR900 11 EU PDR 900 Single Channel Controller RS232 RS485 EU PDR900 11...

Page 36: ...P N 100013905 Revision A September 2007...

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