Series 905
Page 3
Design Guide
About the 905 MicroPirani™ Sensor Kit
The 905 MicroPirani™ Sensor Kit is an ultra
compact wide range vacuum pressure transducer
designed for OEM system integration. The transducer
is based on well proven thermal conductivity MEMS
(Micro-ElectroMechanical System) sensor technology
and meets the equipment market demand for
integrated vacuum solutions.
Features and benefits
• Wide measuring range, from atmosphere to 10
-5
Torr
• Integration with equipment electronics
• Three open collector set points for advanced process control
• User-friendly digital control via host processor or computer
• Analog output with 0.5VDC / decade
• Analog / digital remote zero calibration provides ease of operation
• Ultra compact dimensional design simplifies installation
• Standard DIP 28 pin footprint for easy integration
• RoHS compliant
The 905 MicroPirani™ Sensor Kit is a calibrated plug and play vacuum pressure transducer solution for
OEM system integration. The kit consists of a MEMS-based pressure sensor and a measuring electronics
and processor module. The electronics module fits a standard 28 pin DIP socket and can easily be
integrated on a printed circuit board together with other electronics. The sensor module can either be wired
through the circuit board or connected by a flexible flat cable from the electronics module. The MicroPirani™
sensor element consists of a silicon chip construction, where thermal conductivity is measured in a small
cavity where gas is passed by diffusion instead of flow (see appendix). The MicroPirani™ offers a wide
measuring range of 1-2 decades lower than traditional wire based pirani and convection gauges. The sensor
can be mounted in any orientation without compromise of measurement performance. The advanced
electronics module offers a wide selection of interface possibilities including an analog voltage output of 0.5
VDC / decade, digital communication via TTL UART interface and three independent open collector set
points. The digital interface can transfer real time measuring data directly to a host processor or be used for
configuration of set point parameters and user calibration.
Applications
The 905 MicroPirani™ Sensor Kit can be used in a variety of applications and systems, including:
• Gas analysis – Mass spectrometry
• Scanning electron microscopes
• Vacuum pumping systems
• Gas leak detectors
• Semi surface and thin film analysis
• Space flight systems
• Vacuum valves
• Freeze drying
• UHV gauges
• Gyroscopes
