Series 905
Page 4
Design Guide
Applications (continued)
The following are some of the more common applications for the MicroPirani™ Sensor Kit:
Gas leak detection
The portable MKS Pico helium leak detector uses MicroPirani™ sensor kit technology for inlet vacuum
measurement and protection of the helium mass spectrometer.
Figure 1 - MKS Pico helium detector
Mass spectrometers
In a mass spectrometer, the mean distance between molecules must reach a certain distance before
activating the analyzing cell. The MicroPirani™ Sensor Kit can be used to measure pressure and thereby
determine adequate mean free path of molecules. The size of mass spectrometers is constantly shrinking
and the sensor kit significantly reduces space taken by traditional vacuum gauges, allowing more compact
equipment design.
Pumping systems
Traditional vacuum gauges occupy significant space in a pumping system. The compact size of the sensor
kit allow pump manufacturers to integrate vacuum measurement solutions in pumping systems like multi-
stage turbo molecular pumping systems.
Figure 2 - Generic molecular pump
Space flight systems
The low weight and highly robust MEMS sensor design allows use in demanding applications and extreme
environments like equipment for use in space flight. The electronics and sensor element are designed to
withstand the extreme g-forces and intense vibrations experienced during rocket launch.
