Chapter Four: Maintenance
General Information
31
Chapter Four: Maintenance
General Information
If the 253 valve fails to operate properly upon receipt, check for shipping damage, and check the
cables for proper continuity. Any damage should be reported to the carrier and MKS Instruments
immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment
Return Authorization Number) from a MKS Service Center before shipping. Please refer to the
inside back cover of this manual for a list of MKS Calibration and Service Centers.
Maintenance
Periodically check for wear on the cables and inspect the valve for visible signs of damage.
Difficulties encountered in the use of valves generally are caused by process chemistry,
contamination of wetted parts, or mechanical wear. Contact any authorized MKS Service Center for
repair instructions if you encounter any difficulties you cannot correct.
How To Clean the Unit
Periodically wipe down the unit with a cloth dampened with deionized water.
Summary of Contents for 253B-1-2CF-1
Page 3: ...118843 P1 Rev C 2 99 MKS Type 253B Exhaust Throttle Valve...
Page 8: ...List of Figures and Tables vi...
Page 40: ...Maintenance Chapter Four Maintenance 32 This page intentionally left blank...
Page 52: ...Model Code Appendix B Model Code Explanation 44 This page intentionally left blank...
