MKS 253B-1-2CF-1, Instruction Manual

Page: 34 / 54

Setup Chapter Two: Installation
26
O-Ring Material
Valves that have an O-ring sealed flapper are called sealing butterfly valves. This design ensures
closed leak rates less than 1.3 x 10
-7
scc/sec when new. Ensure that the O-ring material is
compatible with the gases it will be exposed to in the system.
Mounting Instructions
Warning
The moving parts in the valve create a risk of personal injury
until the valve is securely incorporated into a system. To
avoid injury keep all objects away from any valve opening.
•
Do not insert objects into openings where contact with moving parts is possible.
•
Isolate the equipment from any electrical or pneumatic power supply before handling the
valve.
The valve may be mounted in any position by clamping its KF style flanges or through bolting its
flanges to a pair of mating flanges. Install the valve with the PUMP label (refer to Figure 6, page
28), oriented towards the high vacuum pump. Consideration should be given to providing proper
clearances for valve removal, as routine cleaning may be necessary due to buildup of process
contaminants.