MKS 253B-1-2CF-1, Instruction Manual

Page: 11 / 54

Valve Safety Information Safety Procedures and Precautions
3
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of valve operation. Failure
to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the valve and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply
with these requirements.
Warning
Moving parts in the valve create a risk of personal injury until
the valve is securely incorporated into a system. To avoid
injury, keep all bodily parts away from any valve opening.
1. Do not insert objects into openings where contact with
moving parts is possible.
2. Isolate the valve from any electrical or pneumatic power
supply before handling the valve.
DO NOT SUBSTITUTE PARTS OR MODIFY VALVE
Do not install substitute parts or perform any unauthorized modification to the valve. Return the
valve to an MKS Calibration and Service Center for service and repair to ensure that all safety
features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be performed by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
valve when necessary, and ensure that the material used is compatible with the wetted materials
in this product, including any sealing materials.
PURGE THE VALVE
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This valve must be purged under a ventilation hood, and gloves must be worn for protection.