PPS-
28
Linear/Stepper Motor Positioner Stage
5
Rev: 3.2
MICRONIX USA,LLC
www.micronixusa.com
Reference Manual
1.4
Recommended Controllers
The following controllers are available from MICRONIX USA:
▪
MMC-200 [Stepper Motor Versions]
▪
MMC-300 [Linear Motor Versions]
1.5
Technical Data
1.6
Load Characteristics
Load Characteristics
Fx
(N)
Fy
(N)
Fz
(N)
Mx
(Nm)
My
(Nm)
Mz
(Nm)
k
ax[µrad/Nm]
k
ax[µrad/Nm]
LM-001
2 peak
10
10
1
1
1
-
-
SM-007
5
50
50
1
1
1
-
-
Motor option
LM-001
SM-007
Speed, max.
[mm/sec]
100
5
Encoder option
Analog
(1 V
pp
)
Digital
(RS-
422)
Digital Low Cost
Open
Loop
Analog
(1 V
pp
)
Digital
(RS-
422)
Digital Low
Cost
Resolution, typical
[
μ
m]
0.01
0.01
0.5
0.1
0.05
0.05
0.5
Repeatability,
bi-directional
[
µ
m]
± 0.05
± 0.1
±1
± 4
± 0.2
± 0.2
±1
Repeatability,
uni-directional [µ
m]
0.05
0.1
1
0.5
0.2
0.2
1
