ES-
50
Elevation Stage
Rev: 3.05
5
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
2.
Model Configurations
2.1
ES-50 Order Numbers
* Other resolutions available upon request.
Contact MICRONIX USA for custom versions and stacking configurations.
Order No.
ES-50-
1 1
1
SM-001
1
10 mm
1
Open Loop
0
Analog(1Vpp), 50nm*
2
Digital(RS-422), 50nm*
3
Digital Low Cost(RS-422),
4
Mechanical Limits
1
Non-vacuum
0
Vacuum prepared, 10
-6
mbar
6