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ES-

50

 

Elevation Stage

 

 

 

 

 

 

Rev: 3.05 

 

17  

Reference Manual 

MICRONIX USA,LLC 

  

www.micronixusa.com 

 
 

8.

 

Supplementary Information 

 

8.1

 

Maintenance 

 

▪

 

The ES-50 elevation stage is a delicate mechanical device and should be 
handled with care. Do not drop or mishandle the stage. 

▪

 

Keep hands clear of all moving parts while the stage is in motion to avoid 
personal injury.  

▪

 

Follow  the 

Installation  Preparation

  requirements  and  use  proper  cable 

management to ensure a clean and safe operating environment. 

▪

 

Properly wire the feedback to the controller before powering on the stage. 
Failure to do so can result in damage to the stage. 

▪

 

Allow for easy access to the stage in case of servicing. 

 

8.2

 

Units and Conventions 

 

All measurements in this document are in the metric system of units.  
 

Metric Unit 

English Unit 

1 millimeter 

0.0394 inches 

1 micron 

0.0000394 inches 

1 Newton 

0.2248 lbs. 

1 Newton-meter 

8.85 in-lbs. 

 

Summary of Contents for ES-50 Series

Page 1: ...S e r i e s Reference Manual Elevation Stage Open and Closed Loop Versions ES 50 USA...

Page 2: ...ES 50 Elevation Stage Reference Manual Rev 3 05 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Page 3: ...onments 8 5 1 1 Open Loop Installation 8 5 1 2 Closed Loop Installation Wiring Diagram 8 5 2 Vacuum Environments 9 5 2 1 Handling and Preparation 9 5 2 2 Open loop Installation Wiring Diagram 9 5 2 3...

Page 4: ...Reference Manual MICRONIX USA LLC www micronixusa com 6 3 Dimensions 15 6 3 1 ES 50 10mm 15 7 Stacking Configurations 16 7 1 Possible Configurations 16 8 Supplementary Information 17 8 1 Maintenance...

Page 5: ...up to 10 mm The ES 50 allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the VT 50 series of linear stages Versions capable of operation in vacuum 10 6...

Page 6: ...001 Pitch rad 300 Speed Max mm sec 5 Resolution Typical m 0 5 Open Loop 0 05 Closed Loop 0 5 Low Cost Closed Loop Bi directional Repeatability m 2 Open Loop 0 2 Closed Loop 1 Low Cost Closed Loop Uni...

Page 7: ...1 ES 50 Order Numbers Other resolutions available upon request Contact MICRONIX USA for custom versions and stacking configurations Order No ES 50 1 1 1 SM 001 1 10 mm 1 Open Loop 0 Analog 1Vpp 50nm...

Page 8: ...at 20 C 5 C Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmosphere free of corrosive gasses and condensa...

Page 9: ...cap screws for mounting and M1 5 x 5mm dowel pins for precision alignment It may be necessary to move the carriage via the controller in order to access the base mounting holes Additional brackets ma...

Page 10: ...5 1 1 Open Loop Installation Connecting the ES 50 in an open loop only requires that the motor cable be connected to a compatible controller No other cables or components are needed 5 1 2 Closed Loop...

Page 11: ...etc when handling the stage as to avoid any contaminants The connectors that ship with the stage are for testing use only and should be replaced with permanent connectors prior to installation 5 2 2...

Page 12: ...termediate feed through connector at the vacuum chamber wall that can accommodate both the motor cable and the encoder cable Important Match wire colors when connecting the Encoder Head vacuum side to...

Page 13: ...t manually adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders 5 3 1 Encoder Module Overview 5 3 2 Encoder Module Pinout Note Proprietary pins reserved for m...

Page 14: ...ww micronixusa com 5 3 3 Operating and Electrical Specifications 5 3 4 Output Signals Note The index pulse may be aligned with A or B at some interpolation values Power Supply 5VDC 5 330mA 30mA for se...

Page 15: ...ple Purple Limit Switch away from base 8 Not used Not Used 9 Not used Not Used For vacuum prepared wiring blue may be substituted for green white and black for red white Limit Switch Common pin 5 is c...

Page 16: ...themselves A hard stop is designed into the ES 50 body which will prevent the carriage from running away should the limit switches fail The limit switches are factory calibrated to ensure advertised t...

Page 17: ...ES 50 Elevation Stage Rev 3 05 15 Reference Manual MICRONIX USA LLC www micronixusa com 6 3 Dimensions 6 3 1 ES 50 10mm ES 50 shown in retracted position Grey parts for closed loop version only...

Page 18: ...onixusa com 7 Stacking Configurations 7 1 Possible Configurations Using the ES 50 Elevation Stage and VT 50 Linear Stage X Z 55x10 mm X Y Z 55x55x10 mm X Y Z 100x100x10 mm Using the ES 50 Elevation St...

Page 19: ...l injury Follow the Installation Preparation requirements and use proper cable management to ensure a clean and safe operating environment Properly wire the feedback to the controller before powering...

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