Maintenance
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300407956_002_C1 - 01/2017 - © Leybold
This maintenance plan is a recommendation, adjust it according to your
working conditions. With harsh processes intervals should be reduced.
General Notes on Maintenance
Any maintenance work must be performed by qualified personnel. The per-
sonnel must be familiar with the safety rules related to the pump, and must
use the suitable tools to dismantle and clean the contaminated parts.
In order to prevent any danger, don’t move or disassemble the pump
before it has stopped completely; switch off the power supply to the pump
before you start maintenance work.
The pump casing, the exhaust piping and the heating piping are extremely
hot during operation and remain hot for some time after stopping. Keep
the personnel and flammable substances away from the hot area.
Purge the pump with sufficient N
2
gas, at least one hour, before removing
and cleaning the vacuum lines and exhaust piping.
There might be toxic gases or materials remain in the pump, check that
there is nothing remaining before the disassembly.
Don’t reuse any o-ring. Be careful to cleaning all flange surfaces and check
they are undamaged. Check for gas leaks after installing and maintaining
the piping.
With improper use, malfunctions or exposure to fire the pump may have
overheated. Do not touch or inhale thermal breakdown products of fluori-
nated materials which are present if the pump has been subject to temper-
atures of 260 °C and above. These breakdown products are very danger-
ous. Fluorinated materials in the pump may include oils, greases and seals.
Disposal of process byproducts, lubricating oil, vacuum grease and other
wastes must be in strict accordance with all local and national environmen-
tal and safety regulations. For further info see Section 7 Waste Disposal.
DANGER
