Contents
3
300407956_002_C1 - 01/2017 - © Leybold
Original installation and operating instructions.
4 Operation
46
4.1
Before Starting
46
4.1.1 Pumping of monoatomic Gas
47
4.2
Stop Pump
48
4.3 Venting
48
4.4
Removing from Service
49
5 Maintenance
51
5.1
Leybold Service
51
5.2
Maintenance Intervals
51
5.3
Exchanging the Lubricant
53
5.4
Exhaust Piping Connector
54
5.5
Pump Inlet Flange
54
5.6
Purge Gas Pressure and Flow Regulator
55
5.7
Cooling Water Piping
55
5.8
Coolant Level
55
6 Troubleshooting
56
6.1
Pump Malfunctions
56
6.1.1 Malfunctions with CC-type Pumps
56
6.2
Malfunctions with Frequency Converter Operations (option)
56
7
Waste Disposal
59
EC Declaration of Conformity
60
Declaration of Contamination
61
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