Axetris AG
LGD Compact Operating & Integration Instructions; Rev. D
20/46
Micromatch connector J6 (10pol)
Figure 13 Connector assignment Micromatch 10pol
Ordering number receptacle:
Manufacturer: TE connectivity
Description:
MICRO-MATCH MOW.10P
Article number: 8-215083-0
Table 5 Connector assignment 10pol Micromatch
Pin
Name
Description
Measurement
signal
11
PD_I
Photodiode
12
PD_GND*
Laser control
1
Laser_Drive
Laser diode
9
Laser_GND
5
Laser_Supply3V3
8
Laser_U
diff
6
Laser_ID
2
Laser_Thermistor Thermal resistance for laser temperature measurement
3
Laser_GND*
10
La
Peltier element for laser temperature stabilization
7
Laser_TEC-
4
Laser_PT1K
Thermal resistance for optical head temperature
measurement
Temperature
measurement
13
Gascell_PT1K
Thermal resistance for gas temperature measurement
14
Gascell_GND*
Not used
15; 16 Reserve
n/a
* same potential
Supply voltages and output signals
Table 6 Supply voltages and output signals with/without interface board
Supply Voltage
RS232 Communication
Analog Output
Low
High
Low
High
With interface
board
10-30V
-12V
+12V
0V
4mA
5V
20mA
Without
interface board
3.7 - 5V (Pmax
= 1.6W)
0...0.4V
(TTL)
2.4…3.3V (TTL)
0
2.5V
