Kurt J. Lesker 100014434 Operation And Maintenance Manual Download Page 1 | Manualshive

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Operation and

Maintenance Manual

Series 902

Piezo Transducer

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Summary of Contents for 100014434

Page 1: ...Operation and Maintenance Manual Series 902 Piezo Transducer...

Page 2: ......

Page 3: ...Series 902 Piezo Part 100014434 Series 902 Piezo Transducer...

Page 4: ...ditional information The part number can be found on your packing slip Both the part number and serial number are located on the bottom side of the housing For more information or literature contact K...

Page 5: ...Connection 14 Electrical Connection 15 Input Output Wiring 15 902 Piezo Electrical Connections Table 16 Relay Inductive Loads and Arc Suppression 16 Piezo Display Module Connection 17 Operation 18 902...

Page 6: ...Status SS1 25 Calibration Commands 25 User Zero Calibration ZER 25 User Span Calibration SPN 25 Analog Output 26 Linear versus Logarithmic Analog Output 26 Linear Analog Output 26 Logarithmic Analog O...

Page 7: ...ing shipment If anything has been damaged notify the carrier immediately Keep all shipping materials and packaging for claim verification If any items are missing from the package call Kurt J Lesker C...

Page 8: ...CAUTION Refer to the manual Failure to heed the message could result in personal injury serious damage to the equipment or both Calls attention to important procedures practices or conditions Symbols...

Page 9: ...transducer should be connected to earth ground both through the vacuum flange and the back shell of the electrical connector Allow only qualified technicians to service the 902 Piezo transducer Users...

Page 10: ...ective 89 336 EEC NW16 KF 4 VCR F 8 VCR F 1 5 x 1 5 x 2 25 38 1 x 38 1 x 57 2 mm 3 4 oz 97 g Measuring range Set point range Analog out Maximum pressure Accuracy Repeatability Temperature effect on sp...

Page 11: ...hows the top view of the 902 Optional Piezo Display Module The 902 has an optional Piezo Display Module PDM to display pressure The display reads the analog output voltage from the 902 and translates...

Page 12: ...and when the desired pressure is reached trigger the next event in the system process This manual describes the installation and configuration tasks necessary to set up the 902 Piezo After the device...

Page 13: ...fore and roughing pressures generated by mechanical vacuum pumps Alarms to warn of abnormal pressures Start or stop system processes with a relay set point Monitor backfill and venting of gases Contr...

Page 14: ...the vapor could contaminate the sensor elements and cause the calibration to shift Whenever possible install the 902 with the vacuum port facing down to keep particulates or liquids from entering the...

Page 15: ...log output voltages are pins 5 and 8 Connect them to a differential input voltmeter or an analog to digital A D converter with a differential input in a system controller Do not connect the negative s...

Page 16: ...x 107 R E Ia where C is in farads R is in ohms I is DC or Acpeak load current in amperes E is DC or Acpeak source voltage in volts a 1 50 E Note that Rmin 0 5 and Cmin 1 0 x 10 9 F PIN 1 PIN 5 PIN 6 P...

Page 17: ...he rest of the system The following figure shows how to connect the PDM to the 902 Use the two slide lock posts supplied with the PDM kit NALOG 0IEZO 3ERIES 4RANSDUCER 4RANSDUCER 2EMOVE X EX SCREWS AN...

Page 18: ...85 allows communication with multiple transducers whereas RS 232 allows communication with only a single transducer The remainder of this manual refers to RS 485 only 902 Piezo Factory Defaults Table...

Page 19: ...le devices attached to the same system For example use 255 to change the analog output format for all devices Query and Command Syntax Queries return current parameter settings commands change the par...

Page 20: ...K NAK code FF Examples ACK response 253ACK9600 FF baud rate changed to 9600 NAK response 253NAK160 FF command had an error possibly a typo The following list provides descriptions of the NAK codes tha...

Page 21: ...mmand returns or sets the format of the analog output from the Digital to Analog Converter See the Analog Output section for information on the different linear and logarithmic analog outputs Values L...

Page 22: ...or sets the pressure unit to Torr mBar or Pascal The units affect all pressure measurements including set point values Values TORR MBAR PASCAL default TORR Query 001U FF Query Response 001ACKTORR FF C...

Page 23: ...1 command returns the measured pressure Query 001PR1 FF Query Response 001ACK760 3 FF Serial Number SN The SN command returns the 902 serial number Query 001SN FF Query Response 001ACK000012345 FF Tim...

Page 24: ...either 1 or 1 Torr whichever is greater below or above the set point value see Set Point Direction SD1 below and Set Point Value SP1 above If the hysteresis and set point are the same value or nearly...

Page 25: ...ducer Perform zero calibration only when the pressure is below 10 mTorr Perform span calibration only with a very accurate pressure reference like the MKS 390A which has reading errors of less than 0...

Page 26: ...0 Linear Analog Output The advantage of the default 10 VDC linear analog output is that it is easy to interpret since the pressure reading Torr is equal to 100 times the voltage reading e g 7 600 volt...

Page 27: ...mic analog output The Pressure to VoltageTable following the analog output graphs shows the relationship of linear and logarithmic analog output to pressure Linear 10 The graph below shows the correla...

Page 28: ...the output the user will see if the Analog Output Format DAC value is LINEAR5 To receive analog output for LINEAR5 the converter must have a 5 volt scale The linear output is 5 mV Torr or P Torr V x 2...

Page 29: ...to 10 volt scale This is the output the user will see if the Analog Output Format DAC value is LOG10 To receive analog output for LOG10 the converter must have a 10 volt scale The logarithmic output i...

Page 30: ...a 1 to 5 volt scale This is the output the user will see if the Analog Output Format DAC value is LOG5 To receive analog output for LOG5 the converter must have a 5 volt scale The logarithmic output i...

Page 31: ...0 0 0500 5 3979 0 0250 2 6990 6 0 0 0600 5 5563 0 0300 2 7782 7 0 0 0700 5 6902 0 0350 2 8451 8 0 0 0800 5 8062 0 0400 2 9031 9 0 0 0900 5 9085 0 0450 2 9542 10 0 0 1000 6 0000 0 0500 3 0000 20 0 0 20...

Page 32: ...a c o r e z t s u j d A o r e Z r e s U R E Z n o i t a r b i l a C e h t s s e r p r o d n a m m o c O R E Z r e c u d s n a r t e h t f o p o t n o n o t t u b e r u s s e r p c i r e h p s o m t A...

Page 33: ...nd Part Replacement Description Part Number 902 display module 1000 Torr red LED K902001 Cable 9 pin D sub 10 feet K31706S Cable 9 pin D sub 25 feet K31707S Cable 9 pin D sub 50 feet K31708S Operation...

Page 34: ...is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that...

Page 35: ...istive sensors are very high sensitivity very good linearity and virtually no creep or hysteresis A disadvantage with piezo sensors can be their nonlinearity with temperature The 902 has electronic ci...

Page 36: ...36 Series 902 Piezo...

Page 37: ...Series 902 Piezo...

Page 38: ...Series 902 Piezo...

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