Series 902 Piezo
25
Enable Set Point – EN1
The EN1 command returns enable status or enables the set point relay.
Values:
OFF, ON (default: OFF)
Query:
@001EN1?;FF
Query Response:
@001ACKOFF;FF
Command:
@001EN1!ON;FF
Command:
@001ACKON;FF
Set Point Status – SS1
The SS1 command returns the status of the set point relay.
Values:
SET, CLEAR
Query:
@001SS1?;FF
Query Response:
@001ACKCLEAR;FF
Calibration Commands
The 902 is adjusted at the factory using very accurate pressure references.
The user may need to periodically readjust the zero and span calibrations on
the transducer. Perform zero calibration only when the pressure is below
10 mTorr. Perform span calibration only with a very accurate pressure
reference like the MKS 390A which has reading errors of less than 0.05%.
User Zero Calibration – ZER
The ZER command zeroes the 902 reading. Evacuate the transducer
pressure to a measurement below 10 mTorr before performing zero calibration.
Optionally, the user can press the
ZERO
button on the top of the 902 to
perform zero calibration.
Command:
@001ZER!;FF
Command Response:
@001ACKZER;FF
User Span Calibration – SPN
The SPN command sets the span readout for the 902. Vent the transducer
pressure to a measurement between 500–1000 before performing the span
calibration.
Command:
@001SPN!760.0;FF
Command Response:
@001ACK760.0;FF
Summary of Contents for 100014434
Page 1: ...Operation and Maintenance Manual Series 902 Piezo Transducer...
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Page 3: ...Series 902 Piezo Part 100014434 Series 902 Piezo Transducer...
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