background image

                                                                           

MJ400271F1 

 

- 8 -

4. Standard Specifications 

EX-700R 

Flow range (N

2

 conversion) 

F.S.10SCCM

20SLM 

F.S.50, 100, 200SLM 

F.S.300, 400, 500SLM 

Accuracy*1 

±1

F.S. 

±1.5

F.S. 

Applicable gas *2 

N

2

 

(Air, H

2

, He, Ar, O

2

CO

2,

CH

4

/By N

2

 conversion) 

N

2

,(Air, Ar/   

By N

2

 conversion) 

N

2

,(Air,/   

By N

2

 conversion) 

T

em

p

er

at

u

re

 

Accuracy guarantee 
temperature 

15

35

 

Operating temperature 

5

50

 

Storage temperature 

-10

60

 

Operating humidity 

10

90

RH

 

(no condensation) 

Pressure resistance 

980kPa

G

 

 

Fitting (Standard) 

1/4SWL 

3/8SWL 

1/2SWL 

Materials  of  parts  in  contact  with 
gases 

SUS316, SUS316L, PTFE, PCTFE

 (only 300-500SLM)

, FKM (op.

NBR, CR) 

Power supply 

DC24V

±10

%)

, 100mA or lower 

F

lo

w

 r

at

in

d

ic

at

io

n

 

Indicator 

4-digit 7-segment LED (Zero blanking) 

Instantaneous  flow  rate 
indication update cycle 

25, 50, 100, 200, 500, 1000msec

 (selectable) 

Low cut function 

Indication of a value below 0.5% F.S. settable to “0” 

Indication range 

When the low cut 

-10% F.S. to approx. 125

 

F.S. (indication limiter flashing) 

Integrated flow rate 
indication range *3 

8-digit indication (Max. 99,999,999, indication limiter flashing) 
The units of indication are the same as the instantaneous flow rate. 

Digital communication 

RS485

MODBUS

 

RTU

,ID:1

247 

E

x

te

rn

al

 o

u

tp

u

Number of outputs 

2 points (Each output selected and set to instantaneous flow rate upper limit, 
lower limit, upper/lower limit or integrated flow rate reach. 1 point may be 
integrating pulse.) 
Inversion of outputs is possible. 

Output method 

NPN open collector (Max. rating: 30 VDC, 50 mA) 

Integrating pulse output 
rate 

1

F.S.

100%F.S. / pulse, pulse width: approx. 50ms 

Alarm indication 

LED lamps (OUT1, OUT2) turning on 

Analog output*4 

Standard: 4-20mA (500

Ω

 or below) 

Switchable: 1-5V or 0-5V (10k

Ω

 or over) 

Weight 

Approx. 600g 

Approx. 700g 

Approx. 1000g 

N

ee

dl

va

lv

pa

rt

Flow adjust knob turning 

Approx. 12 turns 

Materials of parts in 
contact with gases 

SUS316, PTFE, FKM (op. NBR, CR) 

*1. 

The accuracy is guaranteed for nitrogen gas. 

*2. The full scale of the selected gas is the same as the full scale of N

2

*3. 

The indication of integrated flow rates is for reference. It is held when the power is turned off.

 

Summary of Contents for EX-700R

Page 1: ...MJ400271F1 Mass Flow Meter with indicator EX 700R Instruction Manual...

Page 2: ...Ignoring this symbol and handling the product incorrectly may result in loss of life or serious injury Ignoring this symbol and handling the product incorrectly may result in personal injury or damage...

Page 3: ...Precautions for Handling 3 Overview 4 Standard Specifications 5 ExternalView 6 Applicable Connectors and Pin Assignment 7 Operation 8 Troubleshooting 9 Precautions for maintenance 10 After sale Servi...

Page 4: ...ID plate and make sure these specifications meet your order Date shown on the ID plate MODEL Model name Use of Needle valve Flow rate Output Model name EX 700R Mass Flow Meter Needle Valve 0 V withou...

Page 5: ...MJ400271F1 4...

Page 6: ...MJ400271F1 5...

Page 7: ...MJ400271F1 6 Attension EX 700R and EX 700 old model are different adapter inputs...

Page 8: ...g of flow rates without a need of troublesome flow rate compensation calculation by temperature pressure 3 1 Principle of operation The flow detect sensor is designed with heating wire resistance wire...

Page 9: ...ashing Integrated flow rate indication range 3 8 digit indication Max 99 999 999 indication limiter flashing The units of indication are the same as the instantaneous flow rate Digital communication R...

Page 10: ...MJ400271F1 9...

Page 11: ...MJ400271F1 10...

Page 12: ...MJ400271F1 11...

Page 13: ...MJ400271F1 12...

Page 14: ...MJ400271F1 13 EX 700R and EX 700 old model are different adapter inputs...

Page 15: ...MJ400271F1 14...

Page 16: ...MJ400271F1 15...

Page 17: ...MJ400271F1 16...

Page 18: ...0 OUT2 instantaneous flow rate lower limit preset setting OUT1 instantaneous flow rate lower limit preset setting Dead time value OUT1 integrated flow rate reach preset setting upper 4 digits OUT1 in...

Page 19: ...Reference condition on flow rate 1 A B C D Low cut function selection 0 5 F S P 01 Low cut function selection 3 A B C D Input signals are measured during the period set here and an average value is c...

Page 20: ...rate upper limit preset setting Indicated only when 10 11 or 30 31 are selected in P 10 Description of set values P 10 OUT1 output selection 0 0 The function works according to results of comparison...

Page 21: ...Instantaneous flow rate upper limit output Output when instantaneous flow rate value P 21 upper limit preset value 20 Instantaneous flow rate lower limit output Output when instantaneous flow rate val...

Page 22: ...setting Indicated only when 0 is selected in P 10 1 000 A B C D 1 0 0 0 0 500 1 500 Transmission speed selection 2 A B C D 0 Transmission speed Not indicated when is selected in P 40 Fixed value Star...

Page 23: ...as keeps flowing The sensor must be replaced Please send it to our sales office or the dealer 3 The output will not become zero more than 45 minutes after power on a The control valve is leaking inter...

Page 24: ...and expense provide a replacement product or repair the failed product at the KOFLOC factory The scope of warranty is limited to the product itself and KOFLOC shall not be held liable whatsoever for d...

Page 25: ...MJ400271F1 24...

Reviews: