MJ400271F1
- 8 -
4. Standard Specifications
EX-700R
Flow range (N
2
conversion)
F.S.10SCCM
〜
20SLM
F.S.50, 100, 200SLM
F.S.300, 400, 500SLM
Accuracy*1
±1
%
F.S.
±1.5
%
F.S.
Applicable gas *2
N
2
(Air, H
2
, He, Ar, O
2
,
CO
2,
CH
4
/By N
2
conversion)
N
2
,(Air, Ar/
By N
2
conversion)
N
2
,(Air,/
By N
2
conversion)
T
em
p
er
at
u
re
Accuracy guarantee
temperature
15
〜
35
℃
Operating temperature
5
〜
50
℃
Storage temperature
-10
〜
60
℃
Operating humidity
10
〜
90
%
RH
(no condensation)
Pressure resistance
980kPa
(
G
)
Fitting (Standard)
1/4SWL
3/8SWL
1/2SWL
Materials of parts in contact with
gases
SUS316, SUS316L, PTFE, PCTFE
(only 300-500SLM)
, FKM (op.
︓
NBR, CR)
Power supply
DC24V
(
±10
%)
, 100mA or lower
F
lo
w
r
at
e
in
d
ic
at
io
n
Indicator
4-digit 7-segment LED (Zero blanking)
Instantaneous flow rate
indication update cycle
25, 50, 100, 200, 500, 1000msec
(selectable)
Low cut function
Indication of a value below 0.5% F.S. settable to “0”
Indication range
When the low cut
-10% F.S. to approx. 125
%
F.S. (indication limiter flashing)
Integrated flow rate
indication range *3
8-digit indication (Max. 99,999,999, indication limiter flashing)
The units of indication are the same as the instantaneous flow rate.
Digital communication
RS485
(
MODBUS
RTU
)
,ID:1
〜
247
E
x
te
rn
al
o
u
tp
u
t
Number of outputs
2 points (Each output selected and set to instantaneous flow rate upper limit,
lower limit, upper/lower limit or integrated flow rate reach. 1 point may be
integrating pulse.)
Inversion of outputs is possible.
Output method
NPN open collector (Max. rating: 30 VDC, 50 mA)
Integrating pulse output
rate
1
%
F.S.
〜
100%F.S. / pulse, pulse width: approx. 50ms
Alarm indication
LED lamps (OUT1, OUT2) turning on
Analog output*4
Standard: 4-20mA (500
Ω
or below)
Switchable: 1-5V or 0-5V (10k
Ω
or over)
Weight
Approx. 600g
Approx. 700g
Approx. 1000g
N
ee
dl
e
va
lv
e
pa
rt
s
Flow adjust knob turning
Approx. 12 turns
Materials of parts in
contact with gases
SUS316, PTFE, FKM (op. NBR, CR)
*1.
The accuracy is guaranteed for nitrogen gas.
*2. The full scale of the selected gas is the same as the full scale of N
2
.
*3.
The indication of integrated flow rates is for reference. It is held when the power is turned off.
Summary of Contents for EX-700R
Page 1: ...MJ400271F1 Mass Flow Meter with indicator EX 700R Instruction Manual...
Page 5: ...MJ400271F1 4...
Page 6: ...MJ400271F1 5...
Page 7: ...MJ400271F1 6 Attension EX 700R and EX 700 old model are different adapter inputs...
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Page 11: ...MJ400271F1 10...
Page 12: ...MJ400271F1 11...
Page 13: ...MJ400271F1 12...
Page 14: ...MJ400271F1 13 EX 700R and EX 700 old model are different adapter inputs...
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