Kofloc EX-700R, Instruction Manual

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MJ400271F1
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1. Foreword
Thank you for your selection of the Digital Mass Flow Meter EX-700R.
Prior to using your new equipment, please read this manual thoroughly to ensure it is used in a safe manner.
Please keep in mind that this instruction manual may be revised without notice.
2. Precautions for Handling
◆
Prior to use
All the products have been assembled and adjusted one by one in accordance with the specifications.
The type of gas to use, flow rate and other data are shown on the ID plate attached to the back of the case.
Check the ID plate and make sure these specifications meet your order.
・
Date shown on the ID plate
①
MODEL
︓
Model name
－
Use of Needle valve
－
Flow rate
－
Output
・
Model name
[EX-700R] : Mass Flow Meter
・
Needle Valve
[0]
[V]
: without needle valve
: with needle valve
・
Flow rate
※
[F1]10SCCM
〜
[F14]500SLM
・
Output
[I] : Current 4-20mA
※ Flow range table
②
GAS : Applicable gas
③
FLOW RATE
SCCM =ml/min (0 ℃ 1atm(101.325kPa))
SLM =l/min (0 ℃ , 1atm(101.325kPa))
④
CALIB.: Calibration gas
⑤
PRESSURE : Supply pressure /Outlet pressure
⑥
SERIAL No.
◆
M ain Body Block 25mm square
Code F1 F2 F3 F4 F5 F6 F7 F8
Flow rate 10SCCM 50SCCM 100SCCM 500SCCM 1SLM 5SLM 10SLM 20SLM
◆
M ain Body Block 34mm square
Code F9 F10 F11
Flow rate 50SLM 100SLM 200SLM
◆
M ain Body Block 40mm square
Code F12 F13 F14
Flow rate 300SLM 400SLM 500SLM