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Kobold MAS Series, Instruction Manual

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Kobold MAS Series Instruction Manual Download Page 25

MAS Instruction Manual

Page 24

Kobold Instruments will provide technical assistance over the
phone to qualified repair personnel. Please call Customer Service
Department, Technical Assistance, (412) 788-2830, Fax (412) 788-
4890. European customers can contact Kobold Messring GmbH for
customer service and technical assistance at 49(0)61-92-29-90,
Fax 49(0)61-92-23-398. Please have your Serial Number and
Model Number when you call.

Summary of Contents for MAS Series

Page 1: ...KOBOLD MAS Series Thermal Mass Flowmeters March1997 r2_12 13 PartNumber IM 82 KOBOLDInstrumentsInc 1801ParkwayViewDrive Pittsburgh PA15205 412 788 2830 800 998 1020 Fax 412 788 4890...

Page 2: ...delMAS 2100Flowmeterwithaluminumbodyandnodisplay KoboldInstruments MASSeriesFlowmeters measurethemass flowrateofgasesinrangesfrom0 10standardcubiccentimeters perminute SCCM to0 500standardliterspermin...

Page 3: ...tingorcooling No temperatureorpressurecorrectionsarerequired asinthecaseof mostotherflowmonitoringdeviceslikerotameters turbinemeters andorificeplates Figure 1 2 MAS Operation and Features Direct Moni...

Page 4: ...ompressioninlet outletfittings withorwithoutthedigitaldisplay ortheoptionalpowersupply GasenterstheMASflowbodyanddividesintotwoflowpaths Mostoftheflowgoesthroughthelaminarflowbypass Thiscreates apress...

Page 5: ...assSetand cutawaythe gate s leadingtotherightcombinationoflaminar flowpathsinoneofthetwobypasses Thisprocedurerequires propercalibrationfacilitiesandminimalskillinelectronics FLOW RANGES _____________...

Page 6: ...eper C orbetter PRESSURE COEFFICIENT 0 01 offullscaleperpsi 0 07kg cm2 orbetter RESPONSE TIME 800mstimeconstant 2seconds typical towithin 2 offinal valueover25to100 offullscale PRESSURE DROP _________...

Page 7: ...68 169 67 1 4 SWAGELOCK ALL DIMENSIONS IN INCHES 0 58 14 73 1 16 29 46 0 56 14 22 6 32 X 0 15 DP SELF TAPPING 0 75 19 05 0 38 9 65 0 13 3 30 2 75 69 85 3 00 76 20 0 125 DIA THRU PANEL 2 PLACES FOR TW...

Page 8: ...ength T2 1 5ChannelPowerSupply inNEMABox 115VAC T4 1 5ChannelPowerSupply inNEMABox 230VAC T5 PowerSupply foronechannel 110VAC T6 PowerSupply foronechannel 230VAC UV Upstreamvalve DV Downstreamvalve MS...

Page 9: ...rtages pleasecontact CustomerServiceattheabovephonenumber ortheymaybe contactedinwritingattheaddresslistedinthenextsection PleasedonotreturnanyequipmentwithoutaReturnMaterial Authorization whichisobta...

Page 10: ...Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side of the transducer CAUTION Be sure the arrow on the side o...

Page 11: ...tallation testthefittingsonly Donotuse Tocheckyourinstallation testthefittingsonly Donotuse Tocheckyourinstallation testthefittingsonly Donotuse liquid leak detectors such as Snoop to search for leaks...

Page 12: ...DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connector into DB9 connector jack Do not plug power connect...

Page 13: ...n N A 9 4to20mAOutput N A ____________________________________________________________ NOTE thenumbersontheconnectorplugmaynotagreewiththe numberingsystemasitappearsonourFigure2 2 onprevious page Itis...

Page 14: ...AL CONNECTIONS 3 VerycarefullyunsolderthefourshortleadsfromthePCBtothe display 4 Gainaccesstothedisplaycircuitboardbyremovingthetwo snaprings No 36 andopeningthe clamshell displayenclo sure Removethef...

Page 15: ...asexcessive forcewillbreakthedelicatewireconnections Carefullymove thedisplayassemblytoexposethetwoscrewssecuringthe displaybase No 35 Donotexertexcessiveforceonthedisplay whilerotatingasdoingsocouldc...

Page 16: ...e 1 5 offullscaleaccuracymeansthe0 5VDCoutputsignalisaccurate towithin 0 1VDC andthe4 20mAoutputisaccuratetowithin 0 4mA Thismeans forexample thattheoutputsignalforzero flowcanbeasmuchas 0 1VDCor 0 4m...

Page 17: ...indicatenegativenumbers itisnecessary toadjustdownfromaslightlypositivereading Slowlyrotatethe zeropotclockwiseuntilapositivereadingisindicated Tocomplete thezeroadjustment slowlyturnthepotcountercloc...

Page 18: ...MAS Instruction Manual Page 17 Figure 3 2 Multiple Installation 4 20 Hookup Figure 3 1 Single Unit 4 20 Hookup...

Page 19: ...RROSIVE GASES ARE GAS LINE WHEN TOXIC OR CORROSIVE GASES ARE GAS LINE WHEN TOXIC OR CORROSIVE GASES ARE USED NEVER RETURN AN MAS TO KOBOLD USED NEVER RETURN AN MAS TO KOBOLD USED NEVER RETURN AN MAS T...

Page 20: ...seofyourMAS Koboldhasdesigned thesensortubewiththinwalls Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be Therefore when cleaning be extremel...

Page 21: ...PS1through3 STEP1 WARM UP PlugintheMAStobecalibratedandallowat least15minuteswarm uptimebeforeattemptinganyadjustments STEP2 ZEROADJUST Slideopenthezeroandspanaccessportson thesideofyourMAS Becarefult...

Page 22: ...R27 75 J3 0 0 0 J3 XXXXX 0 AdjustR29 100 LinearizerJumperArray JumpersInstalled _________________________________________________________________ STEP6CALIBRATE 25 Usethecalibrationstandardtosetaflow...

Page 23: ...standard forKoboldInstruments AppendixCishelpfulinthisregard You mustthenusetheK factortablesinAppendixD ThenextstepistoprocurefromKoboldInstrumentstheModelEL Laminar Flow Bypass Set This set of two p...

Page 24: ...____________________________________________________ Nooutput Nopower Pluginpowersupply Cloggedsensor Cleanorreplacesensor PCBdefective RepairorreplacePCB Inletfilter Cleanorreplace screenclogged Will...

Page 25: ...oqualifiedrepairpersonnel PleasecallCustomerService Department TechnicalAssistance 412 788 2830 Fax 412 788 4890 EuropeancustomerscancontactKoboldMessringGmbHfor customerserviceandtechnicalassistancea...

Page 26: ...ishtohaveKoboldcalibratewithadifferentflowrange and orgas pleasetakenoteofthefollowing NOTE 1 FLOW RANGE ThestandardflowrangesgiveninSection1 3 SPECIFICATIONS are fornitrogenatstandardconditionsof1atm...

Page 27: ...MAS Instruction Manual Page 26 APPENDIX A Exploded View of MAS Transducers and Parts Lists...

Page 28: ...MAS Instruction Manual Page 27 Aluminum Assembly High Flow MAS 1100 2100 M82 0022...

Page 29: ...tM82 0017 X ITEM PIN DESCRIPTION 1 41 0175 Body 820 Hi Flow Al 2 41 0176 Cap End 820 HighFlow 3 40 0037 Holder LFE Mod820 4 35 0084 Washer Split 06 5 35 0326 Nut Hex 6 32 SS 6 35 0174 Rod Threaded 6 3...

Page 30: ...MAS Instruction Manual Page 29 MAS Assembly MAS 1000 2000 M82 0023...

Page 31: ...PartsListM82 0018 X PartsListM82 0018 X PartsListM82 0018 X ITEM PIN DESCRIPTION 1 42 0053 2 40 0043 3 31 0001 906 4 42 0105 5 40 0042 6 42 0041 7 31 0001 908 Body 820 Black Screen Mod820 for 10SLPMF...

Page 32: ...MAS Instruction Manual Page 31 Electronics Enclosure Sub Assembly MAS M82 0019 XXXX B...

Page 33: ...C 4 42 0038 Bracket PCB 820 5 42 0044 Slides Zero Span 6 35 0346 Scr FLH Phl 4x0 500 L SLFTPG Zinc 7 42 0052 Cover Top Mod820 8 40 0038 Bracket Adapter 820Displayto830Body 9 35 0288 Scr FLH Phl 4 40X0...

Page 34: ...MAS Instruction Manual Page 33 Sensor Compartment Assembly MAS M82 0020 X B...

Page 35: ...173 HeatSink DieCast 3 43 0037 01 Sensor FlowCapillary 4 41 0171 Bushing SensorO Ring DieCast 5 41 0170 Plate SensorRing 820 DieCast 6 35 0130 Scr Flh Phl 4 40X0 250 L 7 35 0092 Scr Pnh Phl 4X0 562 L...

Page 36: ...MAS Instruction Manual Page 35 Tables 1 4 O D Tube Fitting Type VCO VCR 9 16 18 Thd Comp male male Dim L 4 8 5 0 4 8 Bottom View Outlet End View Stainless Steel Low Flow Dimensional Drawing Side View...

Page 37: ...Flow Range 0 706 1 06 1 77 SCFM Tube O D 3 8 3 8 3 8 Inches Fitting Type 1 4 1 4 VCO 1 4 VCR 9 16 18 Thd Comp male male Dim L 6 27 6 01 6 13 Fitting Type 3 8 3 8 VCO 3 8 VCR 9 16 18 Thd Comp male male...

Page 38: ...100 0 200 0 300 SLM Tube O D 3 8 1 2 3 8 1 2 1 2 Inches Flow Range 3 53 7 06 10 6 SCFM Tube O D 1 2 1 2 1 2 Inches Fitting Type 3 8 3 8 VCO 3 8 VCR 3 4 16 Thd Comp male male Dim L 11 36 11 81 11 93 F...

Page 39: ...itions SCCMorSLM S means standard ACCMorALM A means actual P Absolutepressure kg cm2orpsia and T Absolute temperature D or R K C 273 R F 460 EXAMPLE 1 CHANGING STANDARD CONDITIONS If your MAS has a fl...

Page 40: ...ual gas and 2 Referstothe reference gas TheK factorisderivedfromthefirstlawofthermodynamics appliedtothesensortube asdescribedinSection1 2 PRINCIPLEOF OPERATION H m C T N P 2 where H Theconstantamount...

Page 41: ...ttheconstantbcancelsout Equation 6 isthe fundamentalrelationshipusedintheaccompanyingtables For convenience thetablesgive relative K factors whicharethe ratiosK1 K2 insteadoftheK factorsthemselves Int...

Page 42: ...100 70 3 or Q SCCM N 0 2 PleasenotethattheK factorsrelativetonitrogenmustbeusedin eachcase EXAMPLE 3 We want a MAS to be calibrated for use with dichlorosilane SiH2 CL2 at a 100 SCCM full scale flow...

Page 43: ...ORTANT NOTE ABOUT K FACTORS IMPORTANT NOTE ABOUT K FACTORS Pleasenotethatifyouhaveamassflowmetercalibratedforagas suchasmethaneandwishtousetheK factorstomeasureagas suchasair thattheinaccuracyofthemea...

Page 44: ...arbon Tetrachloride CCl4 N2 31 1655 6 860 KR Carbon Tetrafluoride CF4 N2 42 1654 3 926 KR Freon 14 Carbonyl Fluoride COF2 N2 54 1710 2 945 Carbonyl Sulfide COS N2 66 1651 2 680 Chlorine CL2 N2 86 114...

Page 45: ...3 418 Germanium Tetrachloride GeCL4 N2 27 1071 9 565 KR Helium He He 1 000 1 454 1 241 1786 Hexafluoroethane C2F6 N2 24 1834 6 157 KR Freon 116 Hexane C6H14 N2 18 3968 3 845 KR Hydrogen H2 H2 1 000 1...

Page 46: ...ne C3H8 N2 36 3885 1 967 KR Propylene C3H6 N2 41 3541 1 877 KR Silane SiH4 N2 60 3189 1 433 KR Silicon Tetrachloride SiCl4 N2 28 1270 7 580 KR Silicon Tetrafluoride SiF4 N2 35 1691 4 643 KR Sulfur Dio...

Page 47: ...MAS Instruction Manual Page 46...

Page 48: ...ectricalConnections 14 2 5 4 UsingKobold sSingle Dual andFlo Box Electronics 14 3 OPERATION 15 3 1 QuickOperatingInstructions 15 3 2 NotestoOperatingInstructions 15 4 MAINTENANCE 18 4 1 GeneralStateme...

Page 49: ...icsEnclosureSub Assembly MAS 31 32 SensorCompartmentAssembly MAS 33 34 StainlessSteelLowFlowDimensionalDrawing 35 StainlessSteelMediumFlowDimensionalDrawing 36 StainlessSteelHighFlowDimensionalDrawing...

Page 50: ...amagetoelectronicswillresult The D connectorpinout Damagetoelectronicswillresult The D connectorpinout is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5 1 is in Section 2 5...

Page 51: ...eed150psig 10kg cm2 gauge or150 F 65 556 C 2 ApplypowertoyourMAS IfyouareusingtheKoboldMAS 5000powersupply plugthepowersupplyintolinepowerand theconnectorintotheinputpowerjackonthesideofyourMAS Refer...

Page 52: ...le and4 00mAisforzeroflow 6 TheMASwithIntegralorRemoteDisplay The31 2 digitLCD displayreadsdirectlyinengineeringunitsorpercentoffull scale Thefullscalerangeandgasareshownonthefrontlabel ofyourMAS Thed...

Page 53: ...oxygen service The customer must clean Kobold s Mass Flow Meters or Controllers to the degree that the customer requires for his oxygen flow applications COPYRIGHT KOBOLD INSTRUMENTS INC 1997 No part...

Page 54: ...MAS Instruction Manual Page 54...

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