background image

c.

 

SHADOW

 (a+b+c) – image with strong oblique component, image similar to SEI 

but with BSE, needed for LV mode where SEI detector does not function 
 

The Solid State BSE detector is fairly “slow”, therefore at fast scan speeds the image 
is “blurred” in the raster direction.  This does not occur at slower scans but makes 
focus/astigmatism correction a little more difficult to do. 

ACB

 and manual knob 

adjustment function in all the 

BEIW

 modes 

 

Selecting the Operating Voltage 

1.

 

Click 

Acc. Volt

 

 to get 

 

2.

 

Double Click value to be selected 
The best accelerating voltage to use is very sample and information dependent.  The 
appearance of and information contained in an image taken at 1-5 kV can be very 
different from the “same” image at 20-30 kV.  This is especially true for imaging low 
density (e.g. porous) and/or low-Z (atomic-#) surfaces. 
 
 

Summary of Contents for 6060LV

Page 1: ...computer use the account USER jeol PASSWORD jeol Please do not log into other accounts Use portable media ftp or UIUC NetFiles to transfer your data 3 Prepare your samples before venting Please keep...

Page 2: ...the height gauge for desired working distance No part of the sample should extend above the ruler end A 10 mm W D should be used for nearly all work except low magnification imaging or if you need to...

Page 3: ...contact these when observing your sample 10 Turn on the IR chamber scope if off using the switch button on the control box and a switch on CRT monitor and adjust illumination as needed Always use cham...

Page 4: ...filament heating or Auto Gun Control We found the use of these seem to shorten filament life significantly a Select an area on the sample or sample holder that has reasonably homogeneous brightness a...

Page 5: ...ases after going through a maximum before beginning of orange indicator the gun tilt shifts are misaligned This is usually because the filament was significantly under saturated when you started Resta...

Page 6: ...cus 21 Click ACB auto contrast brightness 22 Focus and check the objective aperture centering especially for high magnification work 23 Fine focus and correct the astigmatism the image manually or cli...

Page 7: ...rging artifacts h Many commonly used functions are available on the knob panel magnification brightness contrast stigmator x and y image fine shift x and y scanning mode and auto functions focus stigm...

Page 8: ...chassis stops blinking slide open stage drawer 6 If changing samples go to step 7 of general operation 7 Change vacuum mode to HV if in LV mode 8 Carefully slide the stage drawer closed Press EVAC bu...

Page 9: ...other translation control Iterate to fine tune Correct any severe astigmatism see below to be able to better fine tune 5 Deselect Wobb Manually Correcting the Astigmatism Note You need an image with...

Page 10: ...10 30 kV is the condition the instrument provides it s best resolution 100 kX possible This is a fairly noisy image even on a Au C sample You must choose the spot size according to your sample and wh...

Page 11: ...focus astigmatism correction a little more difficult to do ACB and manual knob adjustment function in all the BEIW modes Selecting the Operating Voltage 1 Click Acc Volt to get 2 Double Click value t...

Page 12: ...samples but this requires addition procedures wet In general use as low as pressure as possible that works for imaging the sample 1 to 10 s of Pa Again BEIW Shadow mode provides secondary electron lik...

Page 13: ...computer is responding use the software restart START Menu If the computer is locked press and hold the power button on the front of the computer until it turns off Release the button then press it a...

Page 14: ...d Manual control buttons Manual adjusting buttons spotsize contrast brightness etc and image size switching button are arranged Image display area A SEM image of 640 480 pixels can be displayed and th...

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