Instruction Manual VGC301 Controller
InstruTech, Inc.
Page 17
6
Display
6.1
Display - Torr / mTorr
The table below shows the displayed readings at various pressures for selected gases when engineering units
selected is in Torr/mTorr.
Displayed Pressure Readings vs. True Pressure for selected gases
Pressures shown in bold italic font in the shaded areas are in mTorr.
Pressures shown in normal font and in non-shaded areas are in Torr.
N
2
Ar
He
O
2
CO
2
Kr
Freon12
Freon22
D
2
Ne
CH
4
0
mTorr
0.0
0.0
0.0
0.0
0.0
0.0
0.0
0.0
0.0
0.0
0.0
0.1
mTorr
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.1
0.2
mTorr
0.2
0.2
0.2
0.2
0.2
0.2
0.2
0.2
0.2
0.2
0.2
0.5
mTorr
0.5
0.5
0.5
0.5
0.5
0.3
0.5
0.5
0.5
0.5
0.5
1
mTorr
1.0
0.7
0.8
1.0
1.1
0.4
1.5
1.5
1.3
0.7
1.7
2
mTorr
2.0
1.4
1.6
2.0
2.3
1.0
3.1
3.1
2.4
1.5
3.3
5
mTorr
5.0
3.3
4.0
5.0
4.4
2.3
7.6
7.0
6.0
3.5
7.7
10
mTorr
10.0
6.6
8.1
9.7
11.0
4.8
14.7
13.5
12.1
7.1
15.3
20
mTorr
20.0
13.1
16.1
19.8
22.2
9.5
29.9
27.2
24.3
14.1
30.4
50
mTorr
50.0
32.4
40.5
49.2
54.9
23.5
72.5
69.0
60.0
34.8
77.2
100
mTorr
100
64.3
82.0
97.2
107
46.8
143
136
121
70.0
159
200
mTorr
200
126
165
194
210
91.1
275
262
250
141
315
500
mTorr
500
312
435
486
489
217
611
594
687
359
781
1
Torr
1.00
600
940
970
950
400
1.05
1.04
1.55
745
1.60
2
Torr
2.00
1.14
2.22
1.94
1.71
700
1.62
1.66
4.13
1.59
3.33
5
Torr
5.00
2.45
13.5
4.98
3.34
1.28
2.45
2.62
246
5.24
7.53
10
Torr
10.0
4.00
OP
10.3
4.97
1.78
2.96
3.39
OP
21.5
27.9
20
Torr
20.0
5.80
OP
22.3
6.59
2.29
3.32
3.72
OP
584
355
50
Torr
50.0
7.85
OP
77.6
8.22
2.57
3.79
4.14
OP
OP
842
100
Torr
100
8.83
OP
209
9.25
2.74
4.68
4.91
OP
OP
OP
200
Torr
200
9.79
OP
295
12.3
3.32
5.99
6.42
OP
OP
OP
300
Torr
300
11.3
OP
380
16.9
3.59
6.89
7.52
OP
OP
OP
400
Torr
400
13.5
OP
485
22.4
3.94
7.63
8.42
OP
OP
OP
500
Torr
500
16.1
OP
604
28.7
4.21
8.28
9.21
OP
OP
OP
600
Torr
600
18.8
OP
730
36.4
4.44
8.86
9.95
OP
OP
OP
700
Torr
700
21.8
OP
859
46.1
4.65
9.42
10.7
OP
OP
OP
760
Torr
760
23.7
OP
941
53.9
4.75
9.76
11.1
OP
OP
OP
800
Torr
800
25.1
OP
997
59.4
4.84
9.95
11.4
OP
OP
OP
900
Torr
900
28.5
OP
OP
79.5
4.99
10.5
12.0
OP
OP
OP
1000
Torr
1000
32.5
OP
OP
111
5.08
11.1
12.7
OP
OP
OP
Notes:
1) OP = overpressure indication: display will read over pressure
2) Display auto-ranges between Torr and mTorr at 1 Torr
True Total
Pressure
Examples
1)
Gas used is nitrogen (N
2
). Display shows pressure measurement of 10 Torr. True pressure of nitrogen is 10 Torr.
2)
Gas used is argon (Ar). Display shows pressure measurement of 600 mTorr. True pressure of argon is
1 Torr.
3)
Gas used is oxygen (O
2
). Display shows pressure measurement of 486 mTorr. True pressure of oxygen is 500 mTorr.
